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- W2000384143 abstract "ZnSe Diffractive Optical Element (DOE) is one of the advanced optics which utilizes the optical diffraction phenomena by fabricating a micron order pattern on polished mirror-like surface of ZnSe polycrystal substrate. Various applications for a carbon dioxide (CO<sub>2</sub>) laser material processing such as beam-splitting, beam-shaping and beam-homogenizing are available. The micro pattern of ZnSe DOE is fabricated by the photolithography and reactive ion etching (RIE) technique. Its optical property is highly dependent on the depth precision of microfabricated pattern. In RIE by using BCl3 as the etchant gas we have achieved an etching technique to maintain the smooth surface of the ZnSe polycrystal with minimal etching rate dependency on the crystal orientation of each crystal grain. The surface roughness is 2nm Ra before etching and 5 nm Ra after about 4 microns depth etching. This good roughness brings better depth precision. With these etching technique beam-splitting ZnSe DOE with less than 10% intensity uniformity of splitted beams is successfully obtained and it can be put to use for practical CO<sub>2</sub> laser hole drilling." @default.
- W2000384143 created "2016-06-24" @default.
- W2000384143 creator A5004508261 @default.
- W2000384143 creator A5005194638 @default.
- W2000384143 creator A5014150584 @default.
- W2000384143 creator A5022239042 @default.
- W2000384143 creator A5059446472 @default.
- W2000384143 creator A5085311264 @default.
- W2000384143 date "2003-02-21" @default.
- W2000384143 modified "2023-09-30" @default.
- W2000384143 title "Beam-splitting ZnSe diffractive optical element" @default.
- W2000384143 doi "https://doi.org/10.1117/12.486527" @default.
- W2000384143 hasPublicationYear "2003" @default.
- W2000384143 type Work @default.
- W2000384143 sameAs 2000384143 @default.
- W2000384143 citedByCount "3" @default.
- W2000384143 countsByYear W20003841432019 @default.
- W2000384143 crossrefType "proceedings-article" @default.
- W2000384143 hasAuthorship W2000384143A5004508261 @default.
- W2000384143 hasAuthorship W2000384143A5005194638 @default.
- W2000384143 hasAuthorship W2000384143A5014150584 @default.
- W2000384143 hasAuthorship W2000384143A5022239042 @default.
- W2000384143 hasAuthorship W2000384143A5059446472 @default.
- W2000384143 hasAuthorship W2000384143A5085311264 @default.
- W2000384143 hasConcept C100460472 @default.
- W2000384143 hasConcept C105487726 @default.
- W2000384143 hasConcept C107365816 @default.
- W2000384143 hasConcept C111368507 @default.
- W2000384143 hasConcept C120665830 @default.
- W2000384143 hasConcept C121332964 @default.
- W2000384143 hasConcept C127313418 @default.
- W2000384143 hasConcept C1291036 @default.
- W2000384143 hasConcept C130472188 @default.
- W2000384143 hasConcept C136525101 @default.
- W2000384143 hasConcept C142724271 @default.
- W2000384143 hasConcept C159985019 @default.
- W2000384143 hasConcept C162117346 @default.
- W2000384143 hasConcept C168834538 @default.
- W2000384143 hasConcept C171250308 @default.
- W2000384143 hasConcept C192562407 @default.
- W2000384143 hasConcept C204787440 @default.
- W2000384143 hasConcept C207114421 @default.
- W2000384143 hasConcept C2777289219 @default.
- W2000384143 hasConcept C2779227376 @default.
- W2000384143 hasConcept C33220542 @default.
- W2000384143 hasConcept C49040817 @default.
- W2000384143 hasConcept C50774322 @default.
- W2000384143 hasConcept C520434653 @default.
- W2000384143 hasConcept C71039073 @default.
- W2000384143 hasConcept C71924100 @default.
- W2000384143 hasConceptScore W2000384143C100460472 @default.
- W2000384143 hasConceptScore W2000384143C105487726 @default.
- W2000384143 hasConceptScore W2000384143C107365816 @default.
- W2000384143 hasConceptScore W2000384143C111368507 @default.
- W2000384143 hasConceptScore W2000384143C120665830 @default.
- W2000384143 hasConceptScore W2000384143C121332964 @default.
- W2000384143 hasConceptScore W2000384143C127313418 @default.
- W2000384143 hasConceptScore W2000384143C1291036 @default.
- W2000384143 hasConceptScore W2000384143C130472188 @default.
- W2000384143 hasConceptScore W2000384143C136525101 @default.
- W2000384143 hasConceptScore W2000384143C142724271 @default.
- W2000384143 hasConceptScore W2000384143C159985019 @default.
- W2000384143 hasConceptScore W2000384143C162117346 @default.
- W2000384143 hasConceptScore W2000384143C168834538 @default.
- W2000384143 hasConceptScore W2000384143C171250308 @default.
- W2000384143 hasConceptScore W2000384143C192562407 @default.
- W2000384143 hasConceptScore W2000384143C204787440 @default.
- W2000384143 hasConceptScore W2000384143C207114421 @default.
- W2000384143 hasConceptScore W2000384143C2777289219 @default.
- W2000384143 hasConceptScore W2000384143C2779227376 @default.
- W2000384143 hasConceptScore W2000384143C33220542 @default.
- W2000384143 hasConceptScore W2000384143C49040817 @default.
- W2000384143 hasConceptScore W2000384143C50774322 @default.
- W2000384143 hasConceptScore W2000384143C520434653 @default.
- W2000384143 hasConceptScore W2000384143C71039073 @default.
- W2000384143 hasConceptScore W2000384143C71924100 @default.
- W2000384143 hasLocation W20003841431 @default.
- W2000384143 hasOpenAccess W2000384143 @default.
- W2000384143 hasPrimaryLocation W20003841431 @default.
- W2000384143 hasRelatedWork W1953159322 @default.
- W2000384143 hasRelatedWork W1982695652 @default.
- W2000384143 hasRelatedWork W2007813469 @default.
- W2000384143 hasRelatedWork W2041327186 @default.
- W2000384143 hasRelatedWork W2116614267 @default.
- W2000384143 hasRelatedWork W2318469675 @default.
- W2000384143 hasRelatedWork W2378935031 @default.
- W2000384143 hasRelatedWork W2387343942 @default.
- W2000384143 hasRelatedWork W4321138766 @default.
- W2000384143 hasRelatedWork W1995637289 @default.
- W2000384143 isParatext "false" @default.
- W2000384143 isRetracted "false" @default.
- W2000384143 magId "2000384143" @default.
- W2000384143 workType "article" @default.