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- W2000384634 abstract "Nuclear microprobes have been applied to semiconductor process developments. Two or three-dimensional micro-analyses using micro-Rutherford backscattering and channeling on miniaturized structures have been demonstrated. Optimization of memory device structures using soft error mapping and ion beam induced current (IBIC) measurements has been described. Issues arising from microprobe analyses have been discussed." @default.
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- W2000384634 date "1995-09-01" @default.
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- W2000384634 title "Applications of nuclear microprobes to semiconductor process developments" @default.
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- W2000384634 doi "https://doi.org/10.1016/0168-583x(95)00392-4" @default.
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