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- W2000393857 endingPage "790" @default.
- W2000393857 startingPage "786" @default.
- W2000393857 abstract "Modulated beam mass spectrometry has been used to investigate the etch products, surface chemistry and product desorption mechanisms for interaction of Cl2 with Cu(100). The dominant etch product is Cu3Cl3 for T<∼580 °C and CuCl for T>650 °C. Exposure of Cu(100) to Cl2 at temperatures below 150 °C leads to the growth of a copper chloride layer whose thickness increases linearly with time for exposures greater than approximately 1000 langmuirs. The rate of growth of the chloride layer decreases with increasing temperature. Temperature programmed desorption experiments indicate that the chloride desorbs as Cu3Cl3 with zero order kinetics and an activation energy for desorption of about 33 kcal/mol. The zero order desorption kinetics suggest that the quantity of chlorine on the immediate surface remains constant until the chlorine in the bulk is depleted. The activation energy for desorption of 33 kcal/mol is within experimental error equal to the heat of sublimation of Cu3Cl3 from pure copper chloride. This result suggests that etching is simply a ‘‘compound growth’’‐evaporation reaction. Ion bombardment is shown to suppress the etch rate which is probably a consequence of ion‐induced dissociation of Cu3Cl3 and possibly a decreased concentration of chlorine in the surface region." @default.
- W2000393857 created "2016-06-24" @default.
- W2000393857 creator A5035653720 @default.
- W2000393857 date "1985-05-01" @default.
- W2000393857 modified "2023-10-18" @default.
- W2000393857 title "The etching of Cu(100) with Cl<sub>2</sub>" @default.
- W2000393857 doi "https://doi.org/10.1116/1.573309" @default.
- W2000393857 hasPublicationYear "1985" @default.
- W2000393857 type Work @default.
- W2000393857 sameAs 2000393857 @default.
- W2000393857 citedByCount "75" @default.
- W2000393857 countsByYear W20003938572017 @default.
- W2000393857 countsByYear W20003938572019 @default.
- W2000393857 countsByYear W20003938572022 @default.
- W2000393857 countsByYear W20003938572023 @default.
- W2000393857 crossrefType "journal-article" @default.
- W2000393857 hasAuthorship W2000393857A5035653720 @default.
- W2000393857 hasConcept C102931765 @default.
- W2000393857 hasConcept C113196181 @default.
- W2000393857 hasConcept C121332964 @default.
- W2000393857 hasConcept C145148216 @default.
- W2000393857 hasConcept C147789679 @default.
- W2000393857 hasConcept C148898269 @default.
- W2000393857 hasConcept C150394285 @default.
- W2000393857 hasConcept C15744967 @default.
- W2000393857 hasConcept C162711632 @default.
- W2000393857 hasConcept C178790620 @default.
- W2000393857 hasConcept C179104552 @default.
- W2000393857 hasConcept C185592680 @default.
- W2000393857 hasConcept C2776977220 @default.
- W2000393857 hasConcept C2778695967 @default.
- W2000393857 hasConcept C505241676 @default.
- W2000393857 hasConcept C542102704 @default.
- W2000393857 hasConcept C544778455 @default.
- W2000393857 hasConcept C58437636 @default.
- W2000393857 hasConcept C62520636 @default.
- W2000393857 hasConcept C93391505 @default.
- W2000393857 hasConcept C95121573 @default.
- W2000393857 hasConceptScore W2000393857C102931765 @default.
- W2000393857 hasConceptScore W2000393857C113196181 @default.
- W2000393857 hasConceptScore W2000393857C121332964 @default.
- W2000393857 hasConceptScore W2000393857C145148216 @default.
- W2000393857 hasConceptScore W2000393857C147789679 @default.
- W2000393857 hasConceptScore W2000393857C148898269 @default.
- W2000393857 hasConceptScore W2000393857C150394285 @default.
- W2000393857 hasConceptScore W2000393857C15744967 @default.
- W2000393857 hasConceptScore W2000393857C162711632 @default.
- W2000393857 hasConceptScore W2000393857C178790620 @default.
- W2000393857 hasConceptScore W2000393857C179104552 @default.
- W2000393857 hasConceptScore W2000393857C185592680 @default.
- W2000393857 hasConceptScore W2000393857C2776977220 @default.
- W2000393857 hasConceptScore W2000393857C2778695967 @default.
- W2000393857 hasConceptScore W2000393857C505241676 @default.
- W2000393857 hasConceptScore W2000393857C542102704 @default.
- W2000393857 hasConceptScore W2000393857C544778455 @default.
- W2000393857 hasConceptScore W2000393857C58437636 @default.
- W2000393857 hasConceptScore W2000393857C62520636 @default.
- W2000393857 hasConceptScore W2000393857C93391505 @default.
- W2000393857 hasConceptScore W2000393857C95121573 @default.
- W2000393857 hasIssue "3" @default.
- W2000393857 hasLocation W20003938571 @default.
- W2000393857 hasOpenAccess W2000393857 @default.
- W2000393857 hasPrimaryLocation W20003938571 @default.
- W2000393857 hasRelatedWork W1985372691 @default.
- W2000393857 hasRelatedWork W1991101918 @default.
- W2000393857 hasRelatedWork W1998191608 @default.
- W2000393857 hasRelatedWork W2000420579 @default.
- W2000393857 hasRelatedWork W2004756929 @default.
- W2000393857 hasRelatedWork W2372930155 @default.
- W2000393857 hasRelatedWork W2379963742 @default.
- W2000393857 hasRelatedWork W2392793880 @default.
- W2000393857 hasRelatedWork W2949600623 @default.
- W2000393857 hasRelatedWork W4252945673 @default.
- W2000393857 hasVolume "3" @default.
- W2000393857 isParatext "false" @default.
- W2000393857 isRetracted "false" @default.
- W2000393857 magId "2000393857" @default.
- W2000393857 workType "article" @default.