Matches in SemOpenAlex for { <https://semopenalex.org/work/W2000401286> ?p ?o ?g. }
- W2000401286 endingPage "241" @default.
- W2000401286 startingPage "225" @default.
- W2000401286 abstract "In this work, we follow the methodology presented in Lou and Christofides [Estimation and control of surface roughness in thin-film growth using kinetic Monte-Carlo models, Chem. Eng. Sci. 58 (2003a) 3115–3129] to study estimation and control of surface roughness of gallium arsenide (GaAs) (0 0 1) thin films during deposition in a horizontal-flow quartz reactor using triisobutylgallium (TIBGa) and tertiarybutylarsine (TBAs) as precursors with H2 as the carrier gas. The adsorption of TIBGa onto the surface and the migration of Ga atoms on the surface are considered as the two rate-limiting steps in the film growth and are explicitly modeled within a kinetic Monte Carlo simulation framework. The energy barrier and the pre-exponential factor of the migration rate of Ga atoms on the surface used in the simulations are initially determined by fitting the simulation results to experimental data reported in Law et al. [Analysis of the growth modes for gallium arsenide metalorganic vapor-phase epitaxy, J. Appl. Phys. 88 (2000) 508–512]. Then, a roughness estimator is constructed that allows computing estimates of the surface roughness of the GaAs thin films at a time-scale comparable to the real-time evolution of the process using discrete on-line roughness measurements. The estimator involves a kinetic MC simulator based on multiple small-lattice models, an adaptive filter used to reduce roughness stochastic fluctuations and an error compensator used to reduce the error between the roughness estimates and the roughness measurements. The roughness estimates are fed to a proportional–integral (PI) feedback controller which is used to control the surface roughness to a desired level by manipulating the substrate temperature. Application of the proposed estimator/controller structure to the process model based on a large-lattice kinetic Monte Carlo simulator demonstrates successful regulation of the surface roughness to the desired level. The proposed approach is shown to be superior to PI control with direct use of the discrete roughness measurements. The reason being that the available measurement techniques do not provide measurements at a frequency that is comparable to the time-scale of the dominant film growth dynamics." @default.
- W2000401286 created "2016-06-24" @default.
- W2000401286 creator A5002367171 @default.
- W2000401286 creator A5062067602 @default.
- W2000401286 date "2004-12-01" @default.
- W2000401286 modified "2023-10-17" @default.
- W2000401286 title "Feedback control of surface roughness of GaAs (0 0 1) thin films using kinetic Monte Carlo models" @default.
- W2000401286 cites W1965618643 @default.
- W2000401286 cites W1967779367 @default.
- W2000401286 cites W1968087898 @default.
- W2000401286 cites W1969976208 @default.
- W2000401286 cites W1980029952 @default.
- W2000401286 cites W1984349276 @default.
- W2000401286 cites W1997138061 @default.
- W2000401286 cites W2001620602 @default.
- W2000401286 cites W2011182645 @default.
- W2000401286 cites W2011185531 @default.
- W2000401286 cites W2011581571 @default.
- W2000401286 cites W2014203197 @default.
- W2000401286 cites W2023823032 @default.
- W2000401286 cites W2032094317 @default.
- W2000401286 cites W2032302252 @default.
- W2000401286 cites W2034989369 @default.
- W2000401286 cites W2035033289 @default.
- W2000401286 cites W2036223873 @default.
- W2000401286 cites W2042321087 @default.
- W2000401286 cites W2042708641 @default.
- W2000401286 cites W2042766445 @default.
- W2000401286 cites W2047425478 @default.
- W2000401286 cites W2048272235 @default.
- W2000401286 cites W2050034305 @default.
- W2000401286 cites W2056313271 @default.
- W2000401286 cites W2056501044 @default.
- W2000401286 cites W2059310352 @default.
- W2000401286 cites W2068847642 @default.
- W2000401286 cites W2071036391 @default.
- W2000401286 cites W2079000916 @default.
- W2000401286 cites W2082580260 @default.
- W2000401286 cites W2085061065 @default.
- W2000401286 cites W2137971290 @default.
- W2000401286 cites W2140563796 @default.
- W2000401286 cites W2146406789 @default.
- W2000401286 cites W2149622363 @default.
- W2000401286 cites W2150138384 @default.
- W2000401286 cites W2155418451 @default.
- W2000401286 cites W2167782995 @default.
- W2000401286 doi "https://doi.org/10.1016/j.compchemeng.2004.07.006" @default.
- W2000401286 hasPublicationYear "2004" @default.
- W2000401286 type Work @default.
- W2000401286 sameAs 2000401286 @default.
- W2000401286 citedByCount "41" @default.
- W2000401286 countsByYear W20004012862012 @default.
- W2000401286 countsByYear W20004012862014 @default.
- W2000401286 countsByYear W20004012862015 @default.
- W2000401286 countsByYear W20004012862016 @default.
- W2000401286 countsByYear W20004012862017 @default.
- W2000401286 countsByYear W20004012862019 @default.
- W2000401286 countsByYear W20004012862020 @default.
- W2000401286 countsByYear W20004012862022 @default.
- W2000401286 countsByYear W20004012862023 @default.
- W2000401286 crossrefType "journal-article" @default.
- W2000401286 hasAuthorship W2000401286A5002367171 @default.
- W2000401286 hasAuthorship W2000401286A5062067602 @default.
- W2000401286 hasConcept C105795698 @default.
- W2000401286 hasConcept C107365816 @default.
- W2000401286 hasConcept C120665830 @default.
- W2000401286 hasConcept C121332964 @default.
- W2000401286 hasConcept C159985019 @default.
- W2000401286 hasConcept C171250308 @default.
- W2000401286 hasConcept C185592680 @default.
- W2000401286 hasConcept C19067145 @default.
- W2000401286 hasConcept C192562407 @default.
- W2000401286 hasConcept C19499675 @default.
- W2000401286 hasConcept C33923547 @default.
- W2000401286 hasConcept C45786274 @default.
- W2000401286 hasConcept C510052550 @default.
- W2000401286 hasConcept C71039073 @default.
- W2000401286 hasConceptScore W2000401286C105795698 @default.
- W2000401286 hasConceptScore W2000401286C107365816 @default.
- W2000401286 hasConceptScore W2000401286C120665830 @default.
- W2000401286 hasConceptScore W2000401286C121332964 @default.
- W2000401286 hasConceptScore W2000401286C159985019 @default.
- W2000401286 hasConceptScore W2000401286C171250308 @default.
- W2000401286 hasConceptScore W2000401286C185592680 @default.
- W2000401286 hasConceptScore W2000401286C19067145 @default.
- W2000401286 hasConceptScore W2000401286C192562407 @default.
- W2000401286 hasConceptScore W2000401286C19499675 @default.
- W2000401286 hasConceptScore W2000401286C33923547 @default.
- W2000401286 hasConceptScore W2000401286C45786274 @default.
- W2000401286 hasConceptScore W2000401286C510052550 @default.
- W2000401286 hasConceptScore W2000401286C71039073 @default.
- W2000401286 hasIssue "1" @default.
- W2000401286 hasLocation W20004012861 @default.
- W2000401286 hasOpenAccess W2000401286 @default.
- W2000401286 hasPrimaryLocation W20004012861 @default.
- W2000401286 hasRelatedWork W1966522691 @default.
- W2000401286 hasRelatedWork W2012570191 @default.
- W2000401286 hasRelatedWork W2032025132 @default.