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- W2000401972 abstract "Planar optical waveguides were formed in ZnO crystal by Tm+ and O+ ion implantation. The distributions of Tm+ in as-implanted and annealed ZnO samples were investigated by the RBS technique. A shift of the Tm+ peak towards the sample surface and out diffusion were observed after thermal treatment and subsequent O+ ion implantation. Waveguide formation was determined after O+ implantation in Tm+-implanted ZnO crystal. By using the prism-coupling method two guided modes were detected. The refractive index profile in the implanted waveguide was reconstructed according to the SRIM and RCM simulation. The RBS/channelling measurements show that the lattice structure of ZnO did not suffer detectable damage after O+ implantation." @default.
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- W2000401972 date "2009-07-31" @default.
- W2000401972 modified "2023-09-23" @default.
- W2000401972 title "Formation and characterization of ZnO : Tm<sup>+</sup>optical waveguides fabricated by Tm<sup>+</sup>and O<sup>+</sup>ion implantation" @default.
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- W2000401972 doi "https://doi.org/10.1088/0022-3727/42/16/165303" @default.
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