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W2000406197 abstract "The effect of 2,2'-dipyridyl and 3-N,N-dimethylaminodithiocarbamoyl-1-propanesulfonic acid (DPS) during Cu electroless deposition was observed in real time by measuring open-circuit potential and mass change of an electrode with a electrochemical quartz crystal microbalance. During Cu electroless deposition, the addition of 2,2'-dipyridyl reduced the deposition rate. DPS switched its role sensitively according to its concentration: deposition was accelerated at low concentrations and strongly suppressed at high concentrations. However, synergetic suppression effect was observed even at low DPS concentrations when 2,2'-dipyridyl was added together. In this system, the rate of suppression depended on DPS concentration: the higher DPS concentration decreased the deposition rate faster, while the minimum deposition rate was independent of the DPS concentration. Using the synergetic suppression effect, electroless Cu filling of 55-nm trenches was also successfully achieved." @default.
W2000406197 created "2016-06-24" @default.
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W2000406197 date "2014-01-01" @default.
W2000406197 modified "2023-10-14" @default.
W2000406197 title "Real-Time Observation of Cu Electroless Deposition: Synergetic Suppression Effect of 2,2′-Dipyridyl and 3-N,N-Dimethylaminodithiocarbamoyl-1-propanesulfonic Acid" @default.
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W2000406197 doi "https://doi.org/10.1149/2.028404jes" @default.
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