Matches in SemOpenAlex for { <https://semopenalex.org/work/W2000410238> ?p ?o ?g. }
Showing items 1 to 86 of
86
with 100 items per page.
- W2000410238 abstract "This paper studies adhesive wafer bonding of 4 inches GaAs CCD device wafer with Optik glass for wafer level packaging. In this work, Benzocyclobutene (BCB) and dry film (DF) were proposed as the bonding material. Efforts were devoted to the warpage control. The relationship between the extent of warpage and bonding parameters, such as the bonding profile, the thickness of bonding material, supporting wafer, were studied. The total bonding area and bonding strength were also studied. Under the optimized bonding conditions, warpage of 90.40 um was obtained for BCB bonding. The optimized condition was demonstrated. Nearly 100% bonding area was obtained for BCB bonding. For DF bonding, the warpage was 123.47. The bonding strength was 15.89 MPa for DF bonding." @default.
- W2000410238 created "2016-06-24" @default.
- W2000410238 creator A5004896517 @default.
- W2000410238 creator A5012359721 @default.
- W2000410238 creator A5053604810 @default.
- W2000410238 creator A5088181418 @default.
- W2000410238 date "2013-08-01" @default.
- W2000410238 modified "2023-09-26" @default.
- W2000410238 title "Adhesive wafer bonding of GaAs/Glass with Benzocyclobutene and dry film for GaAs CCD" @default.
- W2000410238 cites W1970831471 @default.
- W2000410238 cites W2018018298 @default.
- W2000410238 cites W2018853859 @default.
- W2000410238 cites W2036356183 @default.
- W2000410238 cites W2040235692 @default.
- W2000410238 cites W2040946508 @default.
- W2000410238 cites W2093700407 @default.
- W2000410238 cites W2103609002 @default.
- W2000410238 cites W2105036743 @default.
- W2000410238 cites W2134005060 @default.
- W2000410238 cites W2140688124 @default.
- W2000410238 cites W2159789429 @default.
- W2000410238 cites W2161486734 @default.
- W2000410238 cites W2169624714 @default.
- W2000410238 cites W3187429352 @default.
- W2000410238 doi "https://doi.org/10.1109/icept.2013.6756447" @default.
- W2000410238 hasPublicationYear "2013" @default.
- W2000410238 type Work @default.
- W2000410238 sameAs 2000410238 @default.
- W2000410238 citedByCount "1" @default.
- W2000410238 countsByYear W20004102382016 @default.
- W2000410238 crossrefType "proceedings-article" @default.
- W2000410238 hasAuthorship W2000410238A5004896517 @default.
- W2000410238 hasAuthorship W2000410238A5012359721 @default.
- W2000410238 hasAuthorship W2000410238A5053604810 @default.
- W2000410238 hasAuthorship W2000410238A5088181418 @default.
- W2000410238 hasConcept C159985019 @default.
- W2000410238 hasConcept C160671074 @default.
- W2000410238 hasConcept C192562407 @default.
- W2000410238 hasConcept C201414436 @default.
- W2000410238 hasConcept C2776366733 @default.
- W2000410238 hasConcept C2779133538 @default.
- W2000410238 hasConcept C2779227376 @default.
- W2000410238 hasConcept C2779278059 @default.
- W2000410238 hasConcept C2984173401 @default.
- W2000410238 hasConcept C49040817 @default.
- W2000410238 hasConcept C521977710 @default.
- W2000410238 hasConcept C68928338 @default.
- W2000410238 hasConceptScore W2000410238C159985019 @default.
- W2000410238 hasConceptScore W2000410238C160671074 @default.
- W2000410238 hasConceptScore W2000410238C192562407 @default.
- W2000410238 hasConceptScore W2000410238C201414436 @default.
- W2000410238 hasConceptScore W2000410238C2776366733 @default.
- W2000410238 hasConceptScore W2000410238C2779133538 @default.
- W2000410238 hasConceptScore W2000410238C2779227376 @default.
- W2000410238 hasConceptScore W2000410238C2779278059 @default.
- W2000410238 hasConceptScore W2000410238C2984173401 @default.
- W2000410238 hasConceptScore W2000410238C49040817 @default.
- W2000410238 hasConceptScore W2000410238C521977710 @default.
- W2000410238 hasConceptScore W2000410238C68928338 @default.
- W2000410238 hasLocation W20004102381 @default.
- W2000410238 hasOpenAccess W2000410238 @default.
- W2000410238 hasPrimaryLocation W20004102381 @default.
- W2000410238 hasRelatedWork W1480931584 @default.
- W2000410238 hasRelatedWork W1967514115 @default.
- W2000410238 hasRelatedWork W1983270982 @default.
- W2000410238 hasRelatedWork W1983875955 @default.
- W2000410238 hasRelatedWork W2003077459 @default.
- W2000410238 hasRelatedWork W2003490788 @default.
- W2000410238 hasRelatedWork W2036356183 @default.
- W2000410238 hasRelatedWork W2080922366 @default.
- W2000410238 hasRelatedWork W2157995048 @default.
- W2000410238 hasRelatedWork W2275650696 @default.
- W2000410238 hasRelatedWork W2281154478 @default.
- W2000410238 hasRelatedWork W2352335320 @default.
- W2000410238 hasRelatedWork W2544616704 @default.
- W2000410238 hasRelatedWork W2951909119 @default.
- W2000410238 hasRelatedWork W3016142403 @default.
- W2000410238 hasRelatedWork W3022651903 @default.
- W2000410238 hasRelatedWork W90349556 @default.
- W2000410238 hasRelatedWork W2869689618 @default.
- W2000410238 hasRelatedWork W2930283382 @default.
- W2000410238 hasRelatedWork W3020264997 @default.
- W2000410238 isParatext "false" @default.
- W2000410238 isRetracted "false" @default.
- W2000410238 magId "2000410238" @default.
- W2000410238 workType "article" @default.