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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2000422079> ?p ?o ?g. }

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• W2000422079 abstract "Scattering of energetic F atoms on a fluorinated Si surface is studied by molecular beam methods. The energy transfer closely follows hard-sphere collision kinematics. Energy and angular distributions of unreacted F atoms suggest significant multiple-bounce scattering in addition to single-bounce scattering and trapping desorption. An empirical model of the atom-surface interaction dynamics is used in a Monte Carlo simulation of topography evolution during neutral beam etching of Si. Model predictions of profile phenomena are validated by experiments." @default.
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• W2000422079 date "1996-09-30" @default.
• W2000422079 modified "2023-10-10" @default.
• W2000422079 title "Gas-Surface Dynamics and Profile Evolution during Etching of Silicon" @default.
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• W2000422079 doi "https://doi.org/10.1103/physrevlett.77.3049" @default.
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