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- W2000430020 abstract "To investigate the nonlinear dose dependence of the thickness of the recrystallized layer during ion beam induced epitaxial recrystallization at amorphous/crystalline interfaces GaAs samples were irradiated with 1.0 MeV Ar+, 1.6 MeV Ar+ or 2.5 MeV Kr+ ions using a dose rate of 1.4 × 1012 cm−2 s−1 at temperatures between 50°C and 180°C. It has been found that the thickness of the recrystallized layer reaches a maximum value at Tmax = 90°C and 135°C for the Ar+ and Kr+ implantations, respectively. This means that the crystallization rate deviates from an Arrhenius dependence due to ion beam induced nucleation and growth within the remaining amorphous layer. The size of the crystallites depends on the implantation dose. This nucleation and growth of the crystallites disturbes and at least blocks the interface movement because the remaining surface layer becomes polycrystalline. Choosing temperatures sufficiently below Tmax the thickness of the recrystallized layer increases linearly with the implantation dose indicating that the irradiation temperature is too low for ion induced nucleation." @default.
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- W2000430020 date "1996-12-01" @default.
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- W2000430020 title "Ion beam induced nucleation in amorphous GaAs layers during MeV implantation" @default.
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- W2000430020 doi "https://doi.org/10.1016/s0168-583x(96)00509-5" @default.
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