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• W2000431569 abstract "This paper describes resonant wireless strain sensors fabricated from magnetoelastic alloys. The transduction mechanism is the $Delta{rm E}$ effect—the change in stiffness of magnetoelastic materials with applied strain or magnetic field. This is measured as a shift in the resonant frequency and is detected wirelessly using pick-up coils utilizing the magnetoelastic coupling of these materials. The sensors are fabricated from a 28- $mu{rm m}$ -thick foil of Metglas 2826 MB $({rm Fe}_{40}{rm Ni}_{rm 38}{rm Mo}_{rm 4}{rm B}_{18})$ , a ferromagnetic magnetoelastic alloy, using microelectrodischarge machining. Two sensor types are described—single and differential. The single sensor has an active area of 7 $,times,$ 2 ${rm mm}^{2}$ , excluding the anchors. At 23 $^{circ}{rm C}$ , it operates at a resonant frequency of 230.8 kHz and has a sensitivity of $13times 10^{3}~{rm ppm}/{rm mstrain}$ ; the dynamic range is 0.05–1.05 mstrain. The differential sensor includes a strain independent reference resonator of area 2 $,times,$ 0.5 ${rm mm}^{2}$ in addition to a sensing element of area 2.5 $,times,$ 0.5 ${rm mm}^{2}$ that is divided into two segments. The sensor resonance is at 266.4 kHz and reference resonance is at 492.75 kHz. The differential sensor provides a dynamic range for 0–1.85 mstrain with a sensitivity of $12.5times 10^{3}~{rm ppm}/{rm mstrain}$ at 23 $^{circ}{rm C}$ . The reference resonator of the differential sensor is used to compensate for the temperature dependence of the Young's modulus of Metglas 2826 MB, which is experimentally estimated to be ${-}{rm 524}~{rm ppm}/^{circ}{rm C}$ . For an increment of 35 $^{circ}{rm C}$ , uncompensated sensors exhibit a resonant frequency shift of up to 42% of the dynamic range for the single sensor and 30% of the dynamic range of the differential sensor, underscoring the necessity of temperature compensation. The geometry of both types of sensors can be modified to accommodate a variety of sensitivity and dynamic range requirements. $hfill{[2013hbox{-}0330]}$" @default.
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• W2000431569 date "2014-12-01" @default.
• W2000431569 modified "2023-10-17" @default.
• W2000431569 title "Passive Wireless Strain Sensors Using Microfabricated Magnetoelastic Beam Elements" @default.
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• W2000431569 doi "https://doi.org/10.1109/jmems.2014.2313809" @default.
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