Matches in SemOpenAlex for { <https://semopenalex.org/work/W2000431968> ?p ?o ?g. }
Showing items 1 to 78 of
78
with 100 items per page.
- W2000431968 endingPage "713" @default.
- W2000431968 startingPage "705" @default.
- W2000431968 abstract "Previous studies have shown that the oxide grown from polycrystalline silicon displays degraded reliability in terms of higher leakage current and premature dielectric breakdown as compared with the oxide grown from single crystal silicon. Present transmission electron microscope studies of the morphology of polycrystalline silicon films and the oxide grown therefrom show several novel features. The polycrystalline silicon becomes rougher after oxidation, the oxide displays thickness undulations which replicate the previous grain boundaries with thinner oxide over grain boundaries, and the oxide forms intergranularly as well as on the free silicon surface. Despite the intergranular oxide formation, the film skin of oxidized polycrystalline silicon does not become significantly more compressive. The surface roughness features of the polycrystalline silicon and oxide and the film stress values are explained by a Si creep mechanism. From these studies some aspects of the reliability of polycrystalline silicon and oxide are understood." @default.
- W2000431968 created "2016-06-24" @default.
- W2000431968 creator A5029704844 @default.
- W2000431968 creator A5046100234 @default.
- W2000431968 creator A5072443001 @default.
- W2000431968 date "1980-03-01" @default.
- W2000431968 modified "2023-10-01" @default.
- W2000431968 title "Silicon Oxidation Studies: Morphological Aspects of the Oxidation of Polycrystalline Silicon" @default.
- W2000431968 doi "https://doi.org/10.1149/1.2129737" @default.
- W2000431968 hasPublicationYear "1980" @default.
- W2000431968 type Work @default.
- W2000431968 sameAs 2000431968 @default.
- W2000431968 citedByCount "73" @default.
- W2000431968 countsByYear W20004319682015 @default.
- W2000431968 countsByYear W20004319682016 @default.
- W2000431968 countsByYear W20004319682018 @default.
- W2000431968 countsByYear W20004319682023 @default.
- W2000431968 crossrefType "journal-article" @default.
- W2000431968 hasAuthorship W2000431968A5029704844 @default.
- W2000431968 hasAuthorship W2000431968A5046100234 @default.
- W2000431968 hasAuthorship W2000431968A5072443001 @default.
- W2000431968 hasConcept C107365816 @default.
- W2000431968 hasConcept C137637335 @default.
- W2000431968 hasConcept C159985019 @default.
- W2000431968 hasConcept C162743726 @default.
- W2000431968 hasConcept C191897082 @default.
- W2000431968 hasConcept C192562407 @default.
- W2000431968 hasConcept C2776390347 @default.
- W2000431968 hasConcept C2777431650 @default.
- W2000431968 hasConcept C2779105228 @default.
- W2000431968 hasConcept C2779227376 @default.
- W2000431968 hasConcept C2779667780 @default.
- W2000431968 hasConcept C2779851234 @default.
- W2000431968 hasConcept C2780565262 @default.
- W2000431968 hasConcept C47908070 @default.
- W2000431968 hasConcept C544956773 @default.
- W2000431968 hasConcept C80086925 @default.
- W2000431968 hasConcept C87359718 @default.
- W2000431968 hasConcept C87976508 @default.
- W2000431968 hasConceptScore W2000431968C107365816 @default.
- W2000431968 hasConceptScore W2000431968C137637335 @default.
- W2000431968 hasConceptScore W2000431968C159985019 @default.
- W2000431968 hasConceptScore W2000431968C162743726 @default.
- W2000431968 hasConceptScore W2000431968C191897082 @default.
- W2000431968 hasConceptScore W2000431968C192562407 @default.
- W2000431968 hasConceptScore W2000431968C2776390347 @default.
- W2000431968 hasConceptScore W2000431968C2777431650 @default.
- W2000431968 hasConceptScore W2000431968C2779105228 @default.
- W2000431968 hasConceptScore W2000431968C2779227376 @default.
- W2000431968 hasConceptScore W2000431968C2779667780 @default.
- W2000431968 hasConceptScore W2000431968C2779851234 @default.
- W2000431968 hasConceptScore W2000431968C2780565262 @default.
- W2000431968 hasConceptScore W2000431968C47908070 @default.
- W2000431968 hasConceptScore W2000431968C544956773 @default.
- W2000431968 hasConceptScore W2000431968C80086925 @default.
- W2000431968 hasConceptScore W2000431968C87359718 @default.
- W2000431968 hasConceptScore W2000431968C87976508 @default.
- W2000431968 hasIssue "3" @default.
- W2000431968 hasLocation W20004319681 @default.
- W2000431968 hasOpenAccess W2000431968 @default.
- W2000431968 hasPrimaryLocation W20004319681 @default.
- W2000431968 hasRelatedWork W1971863879 @default.
- W2000431968 hasRelatedWork W2000645312 @default.
- W2000431968 hasRelatedWork W2052600229 @default.
- W2000431968 hasRelatedWork W2076572501 @default.
- W2000431968 hasRelatedWork W2080780819 @default.
- W2000431968 hasRelatedWork W2145041847 @default.
- W2000431968 hasRelatedWork W2325227490 @default.
- W2000431968 hasRelatedWork W2396832685 @default.
- W2000431968 hasRelatedWork W1997657493 @default.
- W2000431968 hasRelatedWork W2461310273 @default.
- W2000431968 hasVolume "127" @default.
- W2000431968 isParatext "false" @default.
- W2000431968 isRetracted "false" @default.
- W2000431968 magId "2000431968" @default.
- W2000431968 workType "article" @default.