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- W2000432658 abstract "Abstract The influence of N 2 O oxynitridation and oxidation pressure on reliability of ultrathin gate oxides from 4 down to 2.5 nm thickness was investigated. A set of different oxidation parameters was applied during oxide growth which comprised oxidation pressure and N 2 O partial pressure during rapid thermal oxidation. The reliability of the oxides was tested by constant voltage stress. Evaluation of the resulting times to soft breakdown ( t sbd ) for different stress voltages allows to predict a supply (gate) voltage V 10 y, max providing an oxide lifetime of 10 years. For this extrapolation, t sbd was assumed to increase exponentially as stress voltage is reduced. The slope of the extrapolation is found to become steeper as oxides become thinner, which implies higher V 10 y, max and thus higher reliability for thinner oxides as under an assumption of a uniform slope for all thicknesses. Further, the results of this extrapolation demonstrate that oxidation in N 2 O containing ambient can improve oxide reliability for ultrathin gate oxides." @default.
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- W2000432658 date "2001-07-01" @default.
- W2000432658 modified "2023-09-28" @default.
- W2000432658 title "Reliability of ultrathin nitrided oxides grown in low pressure N2O ambient" @default.
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- W2000432658 doi "https://doi.org/10.1016/s0026-2714(01)00071-3" @default.
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