Matches in SemOpenAlex for { <https://semopenalex.org/work/W2000461507> ?p ?o ?g. }
Showing items 1 to 74 of
74
with 100 items per page.
- W2000461507 endingPage "714" @default.
- W2000461507 startingPage "711" @default.
- W2000461507 abstract "Abstract Photochemical vapor deposition of a-Si films at a high rate using SiH 4 and a 185 nm low pressure mercury lamp is described. A maximum rate of 1 nm/sec was attained using the 185 nm lamp. This rate was about ten times higher than that using a 254 nm lamp. Assuming that there is no interaction between the effects of the two wavelengths, the deposition rate per light output power of 184.9 nm light is 160 times larger than that for 253.7 nm light. The absorption cross-section of the 184.9 nm light is ten times greater than that for the 253.7 nm light." @default.
- W2000461507 created "2016-06-24" @default.
- W2000461507 creator A5019536241 @default.
- W2000461507 creator A5052203791 @default.
- W2000461507 creator A5052628398 @default.
- W2000461507 creator A5068495099 @default.
- W2000461507 creator A5087174336 @default.
- W2000461507 date "1983-12-01" @default.
- W2000461507 modified "2023-10-14" @default.
- W2000461507 title "Photochemical vapor deposition of amorphous silicon through 185 nm excitation of monosilane" @default.
- W2000461507 cites W1988344697 @default.
- W2000461507 cites W2041112163 @default.
- W2000461507 cites W2063634264 @default.
- W2000461507 doi "https://doi.org/10.1016/0022-3093(83)90270-3" @default.
- W2000461507 hasPublicationYear "1983" @default.
- W2000461507 type Work @default.
- W2000461507 sameAs 2000461507 @default.
- W2000461507 citedByCount "18" @default.
- W2000461507 crossrefType "journal-article" @default.
- W2000461507 hasAuthorship W2000461507A5019536241 @default.
- W2000461507 hasAuthorship W2000461507A5052203791 @default.
- W2000461507 hasAuthorship W2000461507A5052628398 @default.
- W2000461507 hasAuthorship W2000461507A5068495099 @default.
- W2000461507 hasAuthorship W2000461507A5087174336 @default.
- W2000461507 hasConcept C121332964 @default.
- W2000461507 hasConcept C151730666 @default.
- W2000461507 hasConcept C185592680 @default.
- W2000461507 hasConcept C192562407 @default.
- W2000461507 hasConcept C2776390347 @default.
- W2000461507 hasConcept C2779667780 @default.
- W2000461507 hasConcept C2816523 @default.
- W2000461507 hasConcept C49040817 @default.
- W2000461507 hasConcept C544956773 @default.
- W2000461507 hasConcept C57410435 @default.
- W2000461507 hasConcept C62520636 @default.
- W2000461507 hasConcept C64297162 @default.
- W2000461507 hasConcept C75473681 @default.
- W2000461507 hasConcept C83581075 @default.
- W2000461507 hasConcept C86803240 @default.
- W2000461507 hasConceptScore W2000461507C121332964 @default.
- W2000461507 hasConceptScore W2000461507C151730666 @default.
- W2000461507 hasConceptScore W2000461507C185592680 @default.
- W2000461507 hasConceptScore W2000461507C192562407 @default.
- W2000461507 hasConceptScore W2000461507C2776390347 @default.
- W2000461507 hasConceptScore W2000461507C2779667780 @default.
- W2000461507 hasConceptScore W2000461507C2816523 @default.
- W2000461507 hasConceptScore W2000461507C49040817 @default.
- W2000461507 hasConceptScore W2000461507C544956773 @default.
- W2000461507 hasConceptScore W2000461507C57410435 @default.
- W2000461507 hasConceptScore W2000461507C62520636 @default.
- W2000461507 hasConceptScore W2000461507C64297162 @default.
- W2000461507 hasConceptScore W2000461507C75473681 @default.
- W2000461507 hasConceptScore W2000461507C83581075 @default.
- W2000461507 hasConceptScore W2000461507C86803240 @default.
- W2000461507 hasLocation W20004615071 @default.
- W2000461507 hasOpenAccess W2000461507 @default.
- W2000461507 hasPrimaryLocation W20004615071 @default.
- W2000461507 hasRelatedWork W1599586479 @default.
- W2000461507 hasRelatedWork W2005379894 @default.
- W2000461507 hasRelatedWork W2058504100 @default.
- W2000461507 hasRelatedWork W2065612521 @default.
- W2000461507 hasRelatedWork W2078183599 @default.
- W2000461507 hasRelatedWork W2312552982 @default.
- W2000461507 hasRelatedWork W2312852125 @default.
- W2000461507 hasRelatedWork W2902546961 @default.
- W2000461507 hasRelatedWork W3036157976 @default.
- W2000461507 hasRelatedWork W2085947019 @default.
- W2000461507 hasVolume "59-60" @default.
- W2000461507 isParatext "false" @default.
- W2000461507 isRetracted "false" @default.
- W2000461507 magId "2000461507" @default.
- W2000461507 workType "article" @default.