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• W2000464435 abstract "We present gas sensing performance based on 22 sensor array with four different elements (TiO2, SnO2, WO3 and In2O3 thin films) fabricated by rf sputter. Each thin film was deposited onto the selected SiO2/Si substrate with Pt interdigitated electrodes (IDEs) of 5 m spacing which were fabricated on a SiO2/Si substrate using photolithography and dry etching. For 5 ppm NO2 and 50 ppm CO, each thin film sensor has a different response to offers the distinguishable response pattern for different gas molecules. Compared with the conventional micro-fabrication technology, 22 sensor array with such remarkable response pattern will be open a new foundation for monolithic integration of high-performance chemoresistive sensors with simplicity in fabrication, low cost, high reliablity, and multi- functional smart sensors for environmental monitoring." @default.
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• W2000464435 date "2014-01-29" @default.
• W2000464435 modified "2023-09-23" @default.
• W2000464435 title "Chemiresistive Sensor Array Based on Semiconducting Metal Oxides for Environmental Monitoring" @default.
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• W2000464435 doi "https://doi.org/10.5369/jsst.2014.23.1.15" @default.
• W2000464435 hasPublicationYear "2014" @default.
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