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- W2000466372 abstract "Chemical mechanical polishing of lithium niobate wafer in alkaline slurries has been investigated. In the lithium niobate CMP, the slurry was made by adding colloidal silica abrasive to de-ionized water. The effects of polishing plate speed, slurry flow rate, polishing pressure on removal rate in actual CMP process has been discussed in order to determine the optimum conditions for those parameters. The optimal slurry component is colloid SiO<sub>2</sub>, concentration SiO<sub>2</sub>:DW=1:1; KOH concentration 0.5~1.5% and surfactant 5~15ml/L. The process conditions are polishing plate speed 60rpm, polishing pressure 140KPa and slurry flow rate 120ml/min. The removal rate can reach 300nm/min and surface roughness is 0.21nm." @default.
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- W2000466372 date "2007-12-03" @default.
- W2000466372 modified "2023-10-16" @default.
- W2000466372 title "Study on chemical mechanical polishing process of lithium niobate" @default.
- W2000466372 doi "https://doi.org/10.1117/12.783529" @default.
- W2000466372 hasPublicationYear "2007" @default.
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