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- W2000466431 abstract "The difficulties of nonuniform ion etching which hamper depth profiling by X-ray photoelectron spectroscopy (XPS) have been overcome by use of a mechanically scanned saddle-field ion source. The system and its calibration for uniformity are described, and its performance is illustrated by the depth profile of a Si 3 N 4 /SiO 2 /Si metal nitride oxide silicon device. This also allows the potential advantages of XPS profiling over Auger electron spectroscopy profiling to be discussed." @default.
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- W2000466431 date "1978-03-01" @default.
- W2000466431 modified "2023-09-25" @default.
- W2000466431 title "Uniform Depth Profiling in X-ray Photoelectron Spectroscopy (Electron Spectroscopy for Chemical Analysis)" @default.
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- W2000466431 doi "https://doi.org/10.1366/000370278774331468" @default.
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