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- W2000467057 endingPage "623" @default.
- W2000467057 startingPage "621" @default.
- W2000467057 abstract "Short-channel MOS FET’s are successfully fabricated using Q-switched ruby laser irradiation on As-implanted sources and drains. Implantation and laser irradiation are both self-aligned by the polysilicon gate electrodes. The threshold-voltage–vs–channel-length relation is improved as a result of the extremely limited lateral diffusion of implanted As atoms." @default.
- W2000467057 created "2016-06-24" @default.
- W2000467057 creator A5009495779 @default.
- W2000467057 creator A5011317991 @default.
- W2000467057 creator A5031780212 @default.
- W2000467057 creator A5042609226 @default.
- W2000467057 creator A5056595282 @default.
- W2000467057 date "1979-10-15" @default.
- W2000467057 modified "2023-09-27" @default.
- W2000467057 title "Short‐channel MOS FET’s fabricated by self‐aligned ion implantation and laser annealing" @default.
- W2000467057 cites W1971113486 @default.
- W2000467057 cites W1992063385 @default.
- W2000467057 cites W2073984956 @default.
- W2000467057 cites W2087323788 @default.
- W2000467057 doi "https://doi.org/10.1063/1.91229" @default.
- W2000467057 hasPublicationYear "1979" @default.
- W2000467057 type Work @default.
- W2000467057 sameAs 2000467057 @default.
- W2000467057 citedByCount "16" @default.
- W2000467057 crossrefType "journal-article" @default.
- W2000467057 hasAuthorship W2000467057A5009495779 @default.
- W2000467057 hasAuthorship W2000467057A5011317991 @default.
- W2000467057 hasAuthorship W2000467057A5031780212 @default.
- W2000467057 hasAuthorship W2000467057A5042609226 @default.
- W2000467057 hasAuthorship W2000467057A5056595282 @default.
- W2000467057 hasConcept C111337013 @default.
- W2000467057 hasConcept C119599485 @default.
- W2000467057 hasConcept C120665830 @default.
- W2000467057 hasConcept C121332964 @default.
- W2000467057 hasConcept C127413603 @default.
- W2000467057 hasConcept C145148216 @default.
- W2000467057 hasConcept C147789679 @default.
- W2000467057 hasConcept C165801399 @default.
- W2000467057 hasConcept C172385210 @default.
- W2000467057 hasConcept C17525397 @default.
- W2000467057 hasConcept C178790620 @default.
- W2000467057 hasConcept C185544564 @default.
- W2000467057 hasConcept C185592680 @default.
- W2000467057 hasConcept C191897082 @default.
- W2000467057 hasConcept C192562407 @default.
- W2000467057 hasConcept C195370968 @default.
- W2000467057 hasConcept C2777855556 @default.
- W2000467057 hasConcept C2778613923 @default.
- W2000467057 hasConcept C41823505 @default.
- W2000467057 hasConcept C49040817 @default.
- W2000467057 hasConcept C520434653 @default.
- W2000467057 hasConceptScore W2000467057C111337013 @default.
- W2000467057 hasConceptScore W2000467057C119599485 @default.
- W2000467057 hasConceptScore W2000467057C120665830 @default.
- W2000467057 hasConceptScore W2000467057C121332964 @default.
- W2000467057 hasConceptScore W2000467057C127413603 @default.
- W2000467057 hasConceptScore W2000467057C145148216 @default.
- W2000467057 hasConceptScore W2000467057C147789679 @default.
- W2000467057 hasConceptScore W2000467057C165801399 @default.
- W2000467057 hasConceptScore W2000467057C172385210 @default.
- W2000467057 hasConceptScore W2000467057C17525397 @default.
- W2000467057 hasConceptScore W2000467057C178790620 @default.
- W2000467057 hasConceptScore W2000467057C185544564 @default.
- W2000467057 hasConceptScore W2000467057C185592680 @default.
- W2000467057 hasConceptScore W2000467057C191897082 @default.
- W2000467057 hasConceptScore W2000467057C192562407 @default.
- W2000467057 hasConceptScore W2000467057C195370968 @default.
- W2000467057 hasConceptScore W2000467057C2777855556 @default.
- W2000467057 hasConceptScore W2000467057C2778613923 @default.
- W2000467057 hasConceptScore W2000467057C41823505 @default.
- W2000467057 hasConceptScore W2000467057C49040817 @default.
- W2000467057 hasConceptScore W2000467057C520434653 @default.
- W2000467057 hasIssue "8" @default.
- W2000467057 hasLocation W20004670571 @default.
- W2000467057 hasOpenAccess W2000467057 @default.
- W2000467057 hasPrimaryLocation W20004670571 @default.
- W2000467057 hasRelatedWork W1515639147 @default.
- W2000467057 hasRelatedWork W1616992653 @default.
- W2000467057 hasRelatedWork W1969519405 @default.
- W2000467057 hasRelatedWork W2005629802 @default.
- W2000467057 hasRelatedWork W2011801337 @default.
- W2000467057 hasRelatedWork W2018290460 @default.
- W2000467057 hasRelatedWork W2064155888 @default.
- W2000467057 hasRelatedWork W2074003831 @default.
- W2000467057 hasRelatedWork W2094423372 @default.
- W2000467057 hasRelatedWork W2140666605 @default.
- W2000467057 hasVolume "35" @default.
- W2000467057 isParatext "false" @default.
- W2000467057 isRetracted "false" @default.
- W2000467057 magId "2000467057" @default.
- W2000467057 workType "article" @default.