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- W2000489703 abstract "Advanced principles of integrated circuit fabrication can be applied for three-dimensional microstructures. This technology based on photofabrication is called micromachining. The micromachining makes it possible to fabricate micromachines which have sensors, actuators and electronic circuits on a silicon wafer. Microflow control systems and integrated mechanical sensors were fabricated. Micromachining and micromachines of silicon are reviewed." @default.
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- W2000489703 title "Silicon micromachining and micromachines" @default.
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- W2000489703 doi "https://doi.org/10.1016/0043-1648(93)90215-8" @default.
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