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- W2000496410 abstract "As microlithography progresses to smaller geometries, the tolerance available for exposure variation is rapidly diminishing. Due to this requirement, it is advantageous to set the exposure more accurately by using an exposure meter that has its spectral response matched to the photoresist spectral response. A new exposure meter has been developed that contains a complete UV spectrometer in a package the size of a 100mm wafer chuck. This meter can be adjusted to match the response of any photoresist over the wavelength range of 254 to 436 nanometers." @default.
- W2000496410 created "2016-06-24" @default.
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- W2000496410 date "1982-09-13" @default.
- W2000496410 modified "2023-09-23" @default.
- W2000496410 title "<title>Spectral Exposure Meter</title>" @default.
- W2000496410 doi "https://doi.org/10.1117/12.933557" @default.
- W2000496410 hasPublicationYear "1982" @default.
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