Matches in SemOpenAlex for { <https://semopenalex.org/work/W2000505945> ?p ?o ?g. }
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- W2000505945 endingPage "2829" @default.
- W2000505945 startingPage "2827" @default.
- W2000505945 abstract "Implantation of 1.0 MeV 115In in Si results in secondary-defect formation during subsequent 900 °C annealing if the total number of displaced Si atoms is greater than 1.6×1017/cm2, achieved with a dose near 1.5×1013/cm2. We demonstrate, though, that higher total In doses can be introduced without forming secondary defects by repetitive subthreshold implants each followed by an anneal to remove the implant damage. While a single 6×1013 In/cm2 implant results in a high density of dislocation loops after annealing, instead using four separate 1.5×1013 In/cm2 implants each followed by an anneal leads to the formation of only a few partial dislocations." @default.
- W2000505945 created "2016-06-24" @default.
- W2000505945 creator A5023931992 @default.
- W2000505945 creator A5053926543 @default.
- W2000505945 creator A5054567446 @default.
- W2000505945 creator A5059113181 @default.
- W2000505945 date "1991-06-17" @default.
- W2000505945 modified "2023-09-27" @default.
- W2000505945 title "Avoiding preamorphization damage in MeV heavy ion‐implanted silicon" @default.
- W2000505945 cites W1997890128 @default.
- W2000505945 cites W2013605471 @default.
- W2000505945 cites W2069610278 @default.
- W2000505945 cites W2075017817 @default.
- W2000505945 cites W2082864020 @default.
- W2000505945 doi "https://doi.org/10.1063/1.105228" @default.
- W2000505945 hasPublicationYear "1991" @default.
- W2000505945 type Work @default.
- W2000505945 sameAs 2000505945 @default.
- W2000505945 citedByCount "12" @default.
- W2000505945 crossrefType "journal-article" @default.
- W2000505945 hasAuthorship W2000505945A5023931992 @default.
- W2000505945 hasAuthorship W2000505945A5053926543 @default.
- W2000505945 hasAuthorship W2000505945A5054567446 @default.
- W2000505945 hasAuthorship W2000505945A5059113181 @default.
- W2000505945 hasConcept C119599485 @default.
- W2000505945 hasConcept C127413603 @default.
- W2000505945 hasConcept C145148216 @default.
- W2000505945 hasConcept C156465305 @default.
- W2000505945 hasConcept C159122135 @default.
- W2000505945 hasConcept C159985019 @default.
- W2000505945 hasConcept C165801399 @default.
- W2000505945 hasConcept C172385210 @default.
- W2000505945 hasConcept C177322064 @default.
- W2000505945 hasConcept C178790620 @default.
- W2000505945 hasConcept C185592680 @default.
- W2000505945 hasConcept C191897082 @default.
- W2000505945 hasConcept C192562407 @default.
- W2000505945 hasConcept C2777855556 @default.
- W2000505945 hasConcept C41823505 @default.
- W2000505945 hasConcept C49040817 @default.
- W2000505945 hasConcept C544956773 @default.
- W2000505945 hasConceptScore W2000505945C119599485 @default.
- W2000505945 hasConceptScore W2000505945C127413603 @default.
- W2000505945 hasConceptScore W2000505945C145148216 @default.
- W2000505945 hasConceptScore W2000505945C156465305 @default.
- W2000505945 hasConceptScore W2000505945C159122135 @default.
- W2000505945 hasConceptScore W2000505945C159985019 @default.
- W2000505945 hasConceptScore W2000505945C165801399 @default.
- W2000505945 hasConceptScore W2000505945C172385210 @default.
- W2000505945 hasConceptScore W2000505945C177322064 @default.
- W2000505945 hasConceptScore W2000505945C178790620 @default.
- W2000505945 hasConceptScore W2000505945C185592680 @default.
- W2000505945 hasConceptScore W2000505945C191897082 @default.
- W2000505945 hasConceptScore W2000505945C192562407 @default.
- W2000505945 hasConceptScore W2000505945C2777855556 @default.
- W2000505945 hasConceptScore W2000505945C41823505 @default.
- W2000505945 hasConceptScore W2000505945C49040817 @default.
- W2000505945 hasConceptScore W2000505945C544956773 @default.
- W2000505945 hasIssue "24" @default.
- W2000505945 hasLocation W20005059451 @default.
- W2000505945 hasOpenAccess W2000505945 @default.
- W2000505945 hasPrimaryLocation W20005059451 @default.
- W2000505945 hasRelatedWork W1616992653 @default.
- W2000505945 hasRelatedWork W2031170839 @default.
- W2000505945 hasRelatedWork W2048269824 @default.
- W2000505945 hasRelatedWork W2065258228 @default.
- W2000505945 hasRelatedWork W2065669148 @default.
- W2000505945 hasRelatedWork W2071047578 @default.
- W2000505945 hasRelatedWork W2074173678 @default.
- W2000505945 hasRelatedWork W2094221410 @default.
- W2000505945 hasRelatedWork W2275386326 @default.
- W2000505945 hasRelatedWork W3101130858 @default.
- W2000505945 hasVolume "58" @default.
- W2000505945 isParatext "false" @default.
- W2000505945 isRetracted "false" @default.
- W2000505945 magId "2000505945" @default.
- W2000505945 workType "article" @default.