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- W2000520076 abstract "An rf magnetron discharge used to sputter PbTe in Ar is analyzed using emission spectroscopy. The intensity (I) of the strong Pb, Te, and Ar emission lines is determined near the target and near the substrate as the rf power or gas pressure is varied. It is shown that as the rf power is varied at pressures below 0.5 Pa, the electron temperature is not affected, so that the sputtered atom density N Pb is proportional to I Pb /I Ar . The electron temperature is, however, sensitive to pressure changes. Application of a substrate bias voltage has a large effect on the emission spectra which are not understood." @default.
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- W2000520076 date "1989-04-01" @default.
- W2000520076 modified "2023-09-25" @default.
- W2000520076 title "Emission spectroscopy as a noninvasive probe for process control during radio frequency sputter deposition of PbTe" @default.
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- W2000520076 doi "https://doi.org/10.1139/p89-050" @default.
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