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• W2000529034 endingPage "128" @default.
• W2000529034 startingPage "124" @default.
• W2000529034 abstract "Aluminum nitride (AlN) thin films have attracted interests as the buried dielectric layer in silicon-on-insulator (SOI) substrates. The precondition for this application is that AlN films have smooth surfaces for wafer bonding and excellent insulation properties. In this work, AlN films synthesized by pulsed-laser deposition (PLD) and ion-beam-enhanced deposition (IBED) techniques are compared under the concern of their suitability for SOI application. Both PLD-deposited and IBED-deposited AlN films exhibit smooth surface morphologies. However, AlN films show quite different electrical properties due to different microstructures: microcrystalline wurtzite by PLD but amorphous by IBED. PLD AlN films have high leakage current and high dynamic charge densities. In contrast, IBED films have low leakage current and the breakdown field is about 2.1 MV/cm. Moreover, after postannealing at 800–1100 °C, the breakdown field exceeds 4 MV/cm and the leakage current is reduced nearly two orders in magnitude. We conclude that IBED is more suitable technique to fabricate AlN films as buried insulators in SOI substrates." @default.
• W2000529034 created "2016-06-24" @default.
• W2000529034 creator A5000782343 @default.
• W2000529034 creator A5009324295 @default.
• W2000529034 date "2006-08-01" @default.
• W2000529034 modified "2023-10-18" @default.
• W2000529034 title "A comparison of pulsed-laser-deposited and ion-beam-enhanced-deposited AlN thin films for SOI application" @default.
• W2000529034 cites W1969195748 @default.
• W2000529034 cites W1971534932 @default.
• W2000529034 cites W1975532407 @default.
• W2000529034 cites W1986732940 @default.
• W2000529034 cites W2000459935 @default.
• W2000529034 cites W2000737411 @default.
• W2000529034 cites W2005844119 @default.
• W2000529034 cites W2010029662 @default.
• W2000529034 cites W2032436410 @default.
• W2000529034 cites W2045112945 @default.
• W2000529034 cites W2047723912 @default.
• W2000529034 cites W2074143600 @default.
• W2000529034 cites W2076049427 @default.
• W2000529034 cites W2084183944 @default.
• W2000529034 cites W2093359430 @default.
• W2000529034 cites W2094362213 @default.
• W2000529034 cites W2099043695 @default.
• W2000529034 cites W2101781928 @default.
• W2000529034 cites W2122400190 @default.
• W2000529034 cites W2142023360 @default.
• W2000529034 cites W2052386438 @default.
• W2000529034 doi "https://doi.org/10.1016/j.mseb.2006.06.016" @default.
• W2000529034 hasPublicationYear "2006" @default.
• W2000529034 type Work @default.
• W2000529034 sameAs 2000529034 @default.
• W2000529034 citedByCount "12" @default.
• W2000529034 countsByYear W20005290342013 @default.
• W2000529034 countsByYear W20005290342015 @default.
• W2000529034 countsByYear W20005290342016 @default.
• W2000529034 countsByYear W20005290342018 @default.
• W2000529034 countsByYear W20005290342021 @default.
• W2000529034 crossrefType "journal-article" @default.
• W2000529034 hasAuthorship W2000529034A5000782343 @default.
• W2000529034 hasAuthorship W2000529034A5009324295 @default.
• W2000529034 hasConcept C120665830 @default.
• W2000529034 hasConcept C121332964 @default.
• W2000529034 hasConcept C133386390 @default.
• W2000529034 hasConcept C168834538 @default.
• W2000529034 hasConcept C171250308 @default.
• W2000529034 hasConcept C185592680 @default.
• W2000529034 hasConcept C19067145 @default.
• W2000529034 hasConcept C191897082 @default.
• W2000529034 hasConcept C192562407 @default.
• W2000529034 hasConcept C194760766 @default.
• W2000529034 hasConcept C201370411 @default.
• W2000529034 hasConcept C2779227376 @default.
• W2000529034 hasConcept C3045981 @default.
• W2000529034 hasConcept C37982897 @default.
• W2000529034 hasConcept C49040817 @default.
• W2000529034 hasConcept C50774322 @default.
• W2000529034 hasConcept C53143962 @default.
• W2000529034 hasConcept C535196362 @default.
• W2000529034 hasConcept C544956773 @default.
• W2000529034 hasConcept C56052488 @default.
• W2000529034 hasConcept C8010536 @default.
• W2000529034 hasConceptScore W2000529034C120665830 @default.
• W2000529034 hasConceptScore W2000529034C121332964 @default.
• W2000529034 hasConceptScore W2000529034C133386390 @default.
• W2000529034 hasConceptScore W2000529034C168834538 @default.
• W2000529034 hasConceptScore W2000529034C171250308 @default.
• W2000529034 hasConceptScore W2000529034C185592680 @default.
• W2000529034 hasConceptScore W2000529034C19067145 @default.
• W2000529034 hasConceptScore W2000529034C191897082 @default.
• W2000529034 hasConceptScore W2000529034C192562407 @default.
• W2000529034 hasConceptScore W2000529034C194760766 @default.
• W2000529034 hasConceptScore W2000529034C201370411 @default.
• W2000529034 hasConceptScore W2000529034C2779227376 @default.
• W2000529034 hasConceptScore W2000529034C3045981 @default.
• W2000529034 hasConceptScore W2000529034C37982897 @default.
• W2000529034 hasConceptScore W2000529034C49040817 @default.
• W2000529034 hasConceptScore W2000529034C50774322 @default.
• W2000529034 hasConceptScore W2000529034C53143962 @default.
• W2000529034 hasConceptScore W2000529034C535196362 @default.
• W2000529034 hasConceptScore W2000529034C544956773 @default.
• W2000529034 hasConceptScore W2000529034C56052488 @default.
• W2000529034 hasConceptScore W2000529034C8010536 @default.
• W2000529034 hasIssue "1-3" @default.
• W2000529034 hasLocation W20005290341 @default.
• W2000529034 hasOpenAccess W2000529034 @default.
• W2000529034 hasPrimaryLocation W20005290341 @default.
• W2000529034 hasRelatedWork W1411980818 @default.
• W2000529034 hasRelatedWork W2000529034 @default.
• W2000529034 hasRelatedWork W2011719759 @default.
• W2000529034 hasRelatedWork W2021772077 @default.
• W2000529034 hasRelatedWork W2046156424 @default.
• W2000529034 hasRelatedWork W2059068205 @default.
• W2000529034 hasRelatedWork W2064861484 @default.
• W2000529034 hasRelatedWork W2087863038 @default.
• W2000529034 hasRelatedWork W2202773013 @default.
• W2000529034 hasRelatedWork W4310153986 @default.
• W2000529034 hasVolume "133" @default.

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