FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2000529239> ?p ?o ?g. }

• W2000529239 abstract "The optical properties of aluminum nitrate (AlN) films reactively sputtered on Si substrates using radio-frequency (rf) magnetron have been studied in this work from multiwavelength spectroscopic ellipsometry (SE) measurements performed over the 290–615nm wavelength range. The SE modeling carried out with care to adhere as much to the ellipsometric fitting qualities is also backed up with atomic force microscopy and x-ray-diffraction measurements taken on these films thus grown to nominal thicknesses from 40to150nm under the same optimized experimental conditions. It follows that the model describing the optical properties of the thicker AlN films should consist at least in three layers on the Si substrate: an almost roughnessless smooth surface overlayer that is presumed essentially of Al2O3, a bulk AlN layer, and an AlN interface layer that has a refractive index dispersion falling in the range from 2.04 [312nm] to 1.91 [615nm] on the average and is fairly distinguishable from the slightly higher bulk layer index which drops correspondingly from 2.12 to 1.99. These index values imply that, beneath the partly or mostly oxidized surface AlN layer, the films comprise a polycrystalline-structured bulk AlN layer above a less-microstructurally-ordered interface layer that extends over 40–55nm from the substrate among thicker films. This ellipsometric evidence indicating the existence of the interface layer is consistent with those interface layers confirmed through electron microscopy in some previous works. However, the ellipsometrically insufficient thinner AlN films may be only modeled with the surface layer and an AlN layer. The film surface oxide layer thickness varies between 5 and 15nm among samples. The refractive index dispersions, the layer thicknesses, and the lateral thickness variation of the films are given and discussed regarding the optical constitution of these films and the ellipsometric validity of these parameters." @default.
• W2000529239 created "2016-06-24" @default.
• W2000529239 creator A5026723979 @default.
• W2000529239 creator A5045668902 @default.
• W2000529239 creator A5083515199 @default.
• W2000529239 creator A5084614882 @default.
• W2000529239 date "2005-10-01" @default.
• W2000529239 modified "2023-09-26" @default.
• W2000529239 title "Optical models for radio-frequency-magnetron reactively sputtered AlN films" @default.
• W2000529239 cites W1524648664 @default.
• W2000529239 cites W1965840427 @default.
• W2000529239 cites W1967279520 @default.
• W2000529239 cites W1967540918 @default.
• W2000529239 cites W1968092466 @default.
• W2000529239 cites W1981657248 @default.
• W2000529239 cites W1985316522 @default.
• W2000529239 cites W1996002160 @default.
• W2000529239 cites W1997873756 @default.
• W2000529239 cites W2000750884 @default.
• W2000529239 cites W2003964558 @default.
• W2000529239 cites W2004157914 @default.
• W2000529239 cites W2006869092 @default.
• W2000529239 cites W2023819701 @default.
• W2000529239 cites W2044341201 @default.
• W2000529239 cites W2045563884 @default.
• W2000529239 cites W2050972474 @default.
• W2000529239 cites W2051533936 @default.
• W2000529239 cites W2082067277 @default.
• W2000529239 cites W2091598340 @default.
• W2000529239 cites W2094285478 @default.
• W2000529239 cites W2094808218 @default.
• W2000529239 cites W2097471513 @default.
• W2000529239 cites W2113449004 @default.
• W2000529239 cites W2147517738 @default.
• W2000529239 cites W2151521007 @default.
• W2000529239 cites W2160144133 @default.
• W2000529239 doi "https://doi.org/10.1063/1.2076444" @default.
• W2000529239 hasPublicationYear "2005" @default.
• W2000529239 type Work @default.
• W2000529239 sameAs 2000529239 @default.
• W2000529239 citedByCount "19" @default.
• W2000529239 countsByYear W20005292392018 @default.
• W2000529239 countsByYear W20005292392019 @default.
• W2000529239 countsByYear W20005292392023 @default.
• W2000529239 crossrefType "journal-article" @default.
• W2000529239 hasAuthorship W2000529239A5026723979 @default.
• W2000529239 hasAuthorship W2000529239A5045668902 @default.
• W2000529239 hasAuthorship W2000529239A5083515199 @default.
• W2000529239 hasAuthorship W2000529239A5084614882 @default.
• W2000529239 hasConcept C111368507 @default.
• W2000529239 hasConcept C120665830 @default.
• W2000529239 hasConcept C121332964 @default.
• W2000529239 hasConcept C123408415 @default.
• W2000529239 hasConcept C127313418 @default.
• W2000529239 hasConcept C137637335 @default.
• W2000529239 hasConcept C159985019 @default.
• W2000529239 hasConcept C171250308 @default.
• W2000529239 hasConcept C18293161 @default.
• W2000529239 hasConcept C19067145 @default.
• W2000529239 hasConcept C191897082 @default.
• W2000529239 hasConcept C192562407 @default.
• W2000529239 hasConcept C22423302 @default.
• W2000529239 hasConcept C26873012 @default.
• W2000529239 hasConcept C2775913835 @default.
• W2000529239 hasConcept C2777289219 @default.
• W2000529239 hasConcept C2779227376 @default.
• W2000529239 hasConcept C42067758 @default.
• W2000529239 hasConcept C49040817 @default.
• W2000529239 hasConcept C61427134 @default.
• W2000529239 hasConceptScore W2000529239C111368507 @default.
• W2000529239 hasConceptScore W2000529239C120665830 @default.
• W2000529239 hasConceptScore W2000529239C121332964 @default.
• W2000529239 hasConceptScore W2000529239C123408415 @default.
• W2000529239 hasConceptScore W2000529239C127313418 @default.
• W2000529239 hasConceptScore W2000529239C137637335 @default.
• W2000529239 hasConceptScore W2000529239C159985019 @default.
• W2000529239 hasConceptScore W2000529239C171250308 @default.
• W2000529239 hasConceptScore W2000529239C18293161 @default.
• W2000529239 hasConceptScore W2000529239C19067145 @default.
• W2000529239 hasConceptScore W2000529239C191897082 @default.
• W2000529239 hasConceptScore W2000529239C192562407 @default.
• W2000529239 hasConceptScore W2000529239C22423302 @default.
• W2000529239 hasConceptScore W2000529239C26873012 @default.
• W2000529239 hasConceptScore W2000529239C2775913835 @default.
• W2000529239 hasConceptScore W2000529239C2777289219 @default.
• W2000529239 hasConceptScore W2000529239C2779227376 @default.
• W2000529239 hasConceptScore W2000529239C42067758 @default.
• W2000529239 hasConceptScore W2000529239C49040817 @default.
• W2000529239 hasConceptScore W2000529239C61427134 @default.
• W2000529239 hasIssue "7" @default.
• W2000529239 hasLocation W20005292391 @default.
• W2000529239 hasOpenAccess W2000529239 @default.
• W2000529239 hasPrimaryLocation W20005292391 @default.
• W2000529239 hasRelatedWork W1990694384 @default.
• W2000529239 hasRelatedWork W1998103257 @default.
• W2000529239 hasRelatedWork W2002900002 @default.
• W2000529239 hasRelatedWork W2017093721 @default.
• W2000529239 hasRelatedWork W2024947321 @default.
• W2000529239 hasRelatedWork W2082528703 @default.
• W2000529239 hasRelatedWork W2084200238 @default.

• next