Matches in SemOpenAlex for { <https://semopenalex.org/work/W2000534729> ?p ?o ?g. }
- W2000534729 endingPage "61" @default.
- W2000534729 startingPage "54" @default.
- W2000534729 abstract "In this paper, we review our recent work to assess scanning capacitance microscopy (SCM) as a quantitative two-dimensional (2D) carrier profiling method on Si. SCM measurements on a wide variety of samples are discussed. In the case of unipolar Si samples (i.e. samples with a unique majority carriers type) the reliability of the method for quantification of the SCM raw data to carrier concentration profiles has been demonstrated. Angle beveling sample preparation allows quantitative carrier profiling with unprecedented depth resolution (1 nm), as demonstrated on specially designed samples containing B-doped Si/Si0.75Ge0.25/Si quantum wells. Applications to the study of the dopant diffusion and electrical activation of low-energy implanted B in submicron areas (0.38 μm) are shown. In the case of bipolar Si samples (i.e. samples containing electrical junctions), the crucial issue of electrical junction position determination both on cross-section and on bevel is addressed. Applications to a cross-sectioned 0.35 μm n–p–n transistor characterization are shown." @default.
- W2000534729 created "2016-06-24" @default.
- W2000534729 creator A5012394754 @default.
- W2000534729 creator A5022757793 @default.
- W2000534729 creator A5041246288 @default.
- W2000534729 creator A5044460482 @default.
- W2000534729 creator A5049003724 @default.
- W2000534729 creator A5069135661 @default.
- W2000534729 date "2005-12-01" @default.
- W2000534729 modified "2023-10-06" @default.
- W2000534729 title "Scanning capacitance microscopy two-dimensional carrier profiling for ultra-shallow junction characterization in deep submicron technology" @default.
- W2000534729 cites W1970463987 @default.
- W2000534729 cites W1981545888 @default.
- W2000534729 cites W1988220998 @default.
- W2000534729 cites W1995335472 @default.
- W2000534729 cites W1997960115 @default.
- W2000534729 cites W2000748608 @default.
- W2000534729 cites W2008361798 @default.
- W2000534729 cites W2010192092 @default.
- W2000534729 cites W2017452348 @default.
- W2000534729 cites W2028445570 @default.
- W2000534729 cites W2030869830 @default.
- W2000534729 cites W2033064728 @default.
- W2000534729 cites W2034079005 @default.
- W2000534729 cites W2034922218 @default.
- W2000534729 cites W2038778928 @default.
- W2000534729 cites W2039695470 @default.
- W2000534729 cites W2041798769 @default.
- W2000534729 cites W2047470743 @default.
- W2000534729 cites W2053805921 @default.
- W2000534729 cites W2055264846 @default.
- W2000534729 cites W2067496831 @default.
- W2000534729 cites W2075184220 @default.
- W2000534729 cites W2079845394 @default.
- W2000534729 cites W2080005961 @default.
- W2000534729 cites W2080773397 @default.
- W2000534729 cites W2112426484 @default.
- W2000534729 cites W2113271822 @default.
- W2000534729 cites W2147679395 @default.
- W2000534729 cites W2171466005 @default.
- W2000534729 doi "https://doi.org/10.1016/j.mseb.2005.08.076" @default.
- W2000534729 hasPublicationYear "2005" @default.
- W2000534729 type Work @default.
- W2000534729 sameAs 2000534729 @default.
- W2000534729 citedByCount "7" @default.
- W2000534729 countsByYear W20005347292015 @default.
- W2000534729 countsByYear W20005347292018 @default.
- W2000534729 countsByYear W20005347292022 @default.
- W2000534729 crossrefType "journal-article" @default.
- W2000534729 hasAuthorship W2000534729A5012394754 @default.
- W2000534729 hasAuthorship W2000534729A5022757793 @default.
- W2000534729 hasAuthorship W2000534729A5041246288 @default.
- W2000534729 hasAuthorship W2000534729A5044460482 @default.
- W2000534729 hasAuthorship W2000534729A5049003724 @default.
- W2000534729 hasAuthorship W2000534729A5069135661 @default.
- W2000534729 hasConcept C111919701 @default.
- W2000534729 hasConcept C113196181 @default.
- W2000534729 hasConcept C116017498 @default.
- W2000534729 hasConcept C119599485 @default.
- W2000534729 hasConcept C120665830 @default.
- W2000534729 hasConcept C121332964 @default.
- W2000534729 hasConcept C127413603 @default.
- W2000534729 hasConcept C147080431 @default.
- W2000534729 hasConcept C147789679 @default.
- W2000534729 hasConcept C159985019 @default.
- W2000534729 hasConcept C165801399 @default.
- W2000534729 hasConcept C171250308 @default.
- W2000534729 hasConcept C172385210 @default.
- W2000534729 hasConcept C17525397 @default.
- W2000534729 hasConcept C185592680 @default.
- W2000534729 hasConcept C187191949 @default.
- W2000534729 hasConcept C187921700 @default.
- W2000534729 hasConcept C191952053 @default.
- W2000534729 hasConcept C192562407 @default.
- W2000534729 hasConcept C207521374 @default.
- W2000534729 hasConcept C23061349 @default.
- W2000534729 hasConcept C26771246 @default.
- W2000534729 hasConcept C30066665 @default.
- W2000534729 hasConcept C41008148 @default.
- W2000534729 hasConcept C43617362 @default.
- W2000534729 hasConcept C49040817 @default.
- W2000534729 hasConcept C57863236 @default.
- W2000534729 hasConcept C66938386 @default.
- W2000534729 hasConcept C99752389 @default.
- W2000534729 hasConceptScore W2000534729C111919701 @default.
- W2000534729 hasConceptScore W2000534729C113196181 @default.
- W2000534729 hasConceptScore W2000534729C116017498 @default.
- W2000534729 hasConceptScore W2000534729C119599485 @default.
- W2000534729 hasConceptScore W2000534729C120665830 @default.
- W2000534729 hasConceptScore W2000534729C121332964 @default.
- W2000534729 hasConceptScore W2000534729C127413603 @default.
- W2000534729 hasConceptScore W2000534729C147080431 @default.
- W2000534729 hasConceptScore W2000534729C147789679 @default.
- W2000534729 hasConceptScore W2000534729C159985019 @default.
- W2000534729 hasConceptScore W2000534729C165801399 @default.
- W2000534729 hasConceptScore W2000534729C171250308 @default.
- W2000534729 hasConceptScore W2000534729C172385210 @default.
- W2000534729 hasConceptScore W2000534729C17525397 @default.