Matches in SemOpenAlex for { <https://semopenalex.org/work/W2000534914> ?p ?o ?g. }
Showing items 1 to 78 of
78
with 100 items per page.
- W2000534914 abstract "We are developing a set of dyed red, green, and blue color filter coatings for the fabrication of high resolution CCD and CMOS image sensor arrays. The resists contain photosensitive polymer binders and various curing agents, soluble organic dyes, and solvents. The new dyed photoresists are sensitive to i-line radiation, primarily at 365 nm, and are negative-working, requiring less than 500 mJ of exposure energy for patterning. The coatings are developed in standard Tetramethylammonium Hydroxide (TMAH) developers. Many dyes were examined in order to achieve the desired spectral properties as well as the meet the solvent solubility and thermal stability requirements. Computer modeling was utilized to determine the correct proportions of dye(s) in each resist, after which the modeling results were verified by actual formulation and testing. Thermal stability of the dyes was determined using isothermal. Thermogravimetric Analysis (TGA) at 200°C for 30 minutes. The dyes were evaluated in both traditional (free radical) and novel polymer systems to see if adequate sensitivity, resolution, and feature quality could be obtained. The studies showed that traditional free radical-based photochemistries are marginal at best for high resolution (1-2 micron) applications. To overcome this limitation, a new polymer system having photodimerizable functional units and acid functional groups was developed to impart photosensitivity and developer solubility, respectively. This system, which does not use free radical-initiated photopolymerization as a mechanism for patterning, shows low exposure dose requirements and is capable of resolving features less than 2 micron in size." @default.
- W2000534914 created "2016-06-24" @default.
- W2000534914 creator A5038785506 @default.
- W2000534914 creator A5045268344 @default.
- W2000534914 creator A5046407050 @default.
- W2000534914 creator A5068803044 @default.
- W2000534914 creator A5087705581 @default.
- W2000534914 date "2003-05-14" @default.
- W2000534914 modified "2023-09-26" @default.
- W2000534914 title "Dyed red, green, and blue photoresist for manufacture of high-resolution color filter arrays for image sensors" @default.
- W2000534914 doi "https://doi.org/10.1117/12.476750" @default.
- W2000534914 hasPublicationYear "2003" @default.
- W2000534914 type Work @default.
- W2000534914 sameAs 2000534914 @default.
- W2000534914 citedByCount "7" @default.
- W2000534914 countsByYear W20005349142014 @default.
- W2000534914 countsByYear W20005349142020 @default.
- W2000534914 crossrefType "proceedings-article" @default.
- W2000534914 hasAuthorship W2000534914A5038785506 @default.
- W2000534914 hasAuthorship W2000534914A5045268344 @default.
- W2000534914 hasAuthorship W2000534914A5046407050 @default.
- W2000534914 hasAuthorship W2000534914A5068803044 @default.
- W2000534914 hasAuthorship W2000534914A5087705581 @default.
- W2000534914 hasConcept C105487726 @default.
- W2000534914 hasConcept C127413603 @default.
- W2000534914 hasConcept C134406635 @default.
- W2000534914 hasConcept C136525101 @default.
- W2000534914 hasConcept C142724271 @default.
- W2000534914 hasConcept C15487406 @default.
- W2000534914 hasConcept C159985019 @default.
- W2000534914 hasConcept C166940927 @default.
- W2000534914 hasConcept C171250308 @default.
- W2000534914 hasConcept C192562407 @default.
- W2000534914 hasConcept C204787440 @default.
- W2000534914 hasConcept C2779227376 @default.
- W2000534914 hasConcept C42360764 @default.
- W2000534914 hasConcept C49040817 @default.
- W2000534914 hasConcept C521977710 @default.
- W2000534914 hasConcept C53524968 @default.
- W2000534914 hasConcept C59061564 @default.
- W2000534914 hasConcept C60100273 @default.
- W2000534914 hasConcept C71924100 @default.
- W2000534914 hasConceptScore W2000534914C105487726 @default.
- W2000534914 hasConceptScore W2000534914C127413603 @default.
- W2000534914 hasConceptScore W2000534914C134406635 @default.
- W2000534914 hasConceptScore W2000534914C136525101 @default.
- W2000534914 hasConceptScore W2000534914C142724271 @default.
- W2000534914 hasConceptScore W2000534914C15487406 @default.
- W2000534914 hasConceptScore W2000534914C159985019 @default.
- W2000534914 hasConceptScore W2000534914C166940927 @default.
- W2000534914 hasConceptScore W2000534914C171250308 @default.
- W2000534914 hasConceptScore W2000534914C192562407 @default.
- W2000534914 hasConceptScore W2000534914C204787440 @default.
- W2000534914 hasConceptScore W2000534914C2779227376 @default.
- W2000534914 hasConceptScore W2000534914C42360764 @default.
- W2000534914 hasConceptScore W2000534914C49040817 @default.
- W2000534914 hasConceptScore W2000534914C521977710 @default.
- W2000534914 hasConceptScore W2000534914C53524968 @default.
- W2000534914 hasConceptScore W2000534914C59061564 @default.
- W2000534914 hasConceptScore W2000534914C60100273 @default.
- W2000534914 hasConceptScore W2000534914C71924100 @default.
- W2000534914 hasLocation W20005349141 @default.
- W2000534914 hasOpenAccess W2000534914 @default.
- W2000534914 hasPrimaryLocation W20005349141 @default.
- W2000534914 hasRelatedWork W1966976106 @default.
- W2000534914 hasRelatedWork W1993088749 @default.
- W2000534914 hasRelatedWork W2002816215 @default.
- W2000534914 hasRelatedWork W2035384916 @default.
- W2000534914 hasRelatedWork W2095157408 @default.
- W2000534914 hasRelatedWork W2150695081 @default.
- W2000534914 hasRelatedWork W2279318584 @default.
- W2000534914 hasRelatedWork W2376266960 @default.
- W2000534914 hasRelatedWork W2975304405 @default.
- W2000534914 hasRelatedWork W4283765873 @default.
- W2000534914 isParatext "false" @default.
- W2000534914 isRetracted "false" @default.
- W2000534914 magId "2000534914" @default.
- W2000534914 workType "article" @default.