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• W2000537191 abstract "With the development of IC technology, ultraprecise positioning actuators with nanometre-order resolution are in demand, especially for semiconductor stepper equipment. A prototype X-Y stage for ultraprecise positioning composed of six pneumatic servo spherical bearing actuators (PSSBAs) was developed and its specifications were evaluated especially focusing on the step response and its minimum resolution. The minimum positioning resolution of the prototype was 3 nm under the best conditions, and the positioning resolution as a practical specification was approximately 10 nm for all conditions, even without feedback controls. With a simple feedback control, the minimum resolution was improved to 1 nm, which is enough to meet the demands of current ultraprecise positioning technology." @default.
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• W2000537191 date "2012-06-01" @default.
• W2000537191 modified "2023-09-27" @default.
• W2000537191 title "Nano-Motion X-Y Stage by Pneumatic Servo Spherical Bearing Actuators" @default.
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• W2000537191 doi "https://doi.org/10.4028/www.scientific.net/kem.516.281" @default.
• W2000537191 hasPublicationYear "2012" @default.
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