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• W200054282 abstract "An atomic scale multiprobe interconnection machine is described in the context of building of the molecular devices. It combines various techniques for fabrication and surface analysis. The characterization part consists of low temperature scanning tunneling microscope (LT-STM), four probes variable temperature scanning tunneling microscope (Multiprobe), high resolution scanning electron microscope (SEM). The fabrication part has field ion microscope (FIM), evaporators and nanoimprinter. The characteristics of every part of the instrument and the preliminary experiments on Si(100) surface are discussed." @default.
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• W200054282 date "2012-01-01" @default.
• W200054282 modified "2023-09-26" @default.
• W200054282 title "Atomic Scale Interconnection Machine" @default.
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• W200054282 doi "https://doi.org/10.1007/978-3-642-28172-3_3" @default.
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