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- W2000552432 abstract "A novel technique is described which uses undoped and doped glass depositions at the gate level to make a molybdenum-metal-gate process compatible with a direct-react titanium-silicide clad-moat process. The method is applicable to submeter micro design-rule MOS IC devices and yields 0.3 Ω and 2.0 Ω for gate and moat levels, respectively." @default.
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- W2000552432 date "1984-09-01" @default.
- W2000552432 modified "2023-10-14" @default.
- W2000552432 title "Fabrication of Mo-gate/Ti—silicide-clad-moat MOS Devices by use of multilayer-glass depositions" @default.
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- W2000552432 doi "https://doi.org/10.1109/edl.1984.25951" @default.
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