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- W2000566460 abstract "A process for fabricating sub-half-micrometer-length gates for GaAs MESFETs is described. This process, which uses conventional photolithography, incorporates a number of special techniques to produce the gates from a photomask having 1-μm-length gate patterns. Gates produced by this process have shapes and cross-sectional areas that are comparable to those of gates produced by liftoff using sub-half-micrometer electron-beam lithography. Gates with lengths less than 0.2 μm have been fabricated." @default.
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- W2000566460 date "1985-07-01" @default.
- W2000566460 modified "2023-10-18" @default.
- W2000566460 title "An approach to fabricating sub-half-micrometer-length gates for GaAs metal-semiconductor field-effect transistors" @default.
- W2000566460 doi "https://doi.org/10.1116/1.583021" @default.
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