Matches in SemOpenAlex for { <https://semopenalex.org/work/W2000572085> ?p ?o ?g. }
- W2000572085 endingPage "1208" @default.
- W2000572085 startingPage "1205" @default.
- W2000572085 abstract "High-resolution X-ray diffraction has been carried out by using a vertically and horizontally condensed X-ray microbeam at the Hyogo beamline (BL24XU) of SPring-8. The microbeam is 7×5 μm2 in size and it possesses a small angular divergence and a narrow energy bandwidth. The sample is a Si substrate on which thermal oxide films are fabricated with fine patterns. At the region of the line-and-space pattern, many periodic peaks lying along the transverse direction are observed in a reciprocal space map. Those patterns are attributed to some local strain distribution due to the patterned oxide film on the Si wafer." @default.
- W2000572085 created "2016-06-24" @default.
- W2000572085 creator A5006150695 @default.
- W2000572085 creator A5011249707 @default.
- W2000572085 creator A5025216304 @default.
- W2000572085 creator A5029337942 @default.
- W2000572085 creator A5043471091 @default.
- W2000572085 creator A5048964248 @default.
- W2000572085 creator A5061793560 @default.
- W2000572085 creator A5070431285 @default.
- W2000572085 creator A5070859075 @default.
- W2000572085 creator A5074625131 @default.
- W2000572085 creator A5088026277 @default.
- W2000572085 creator A5053249537 @default.
- W2000572085 date "2001-07-01" @default.
- W2000572085 modified "2023-10-16" @default.
- W2000572085 title "Study of local strain distribution in semiconductor devices using high-resolution X-ray microbeam diffractometry" @default.
- W2000572085 cites W1991058883 @default.
- W2000572085 cites W2000099250 @default.
- W2000572085 cites W2007289668 @default.
- W2000572085 cites W2012338999 @default.
- W2000572085 cites W2019049010 @default.
- W2000572085 cites W2024118495 @default.
- W2000572085 cites W2026643988 @default.
- W2000572085 cites W2031196422 @default.
- W2000572085 cites W2060740152 @default.
- W2000572085 cites W2093155470 @default.
- W2000572085 doi "https://doi.org/10.1016/s0168-9002(01)00578-2" @default.
- W2000572085 hasPublicationYear "2001" @default.
- W2000572085 type Work @default.
- W2000572085 sameAs 2000572085 @default.
- W2000572085 citedByCount "0" @default.
- W2000572085 crossrefType "journal-article" @default.
- W2000572085 hasAuthorship W2000572085A5006150695 @default.
- W2000572085 hasAuthorship W2000572085A5011249707 @default.
- W2000572085 hasAuthorship W2000572085A5025216304 @default.
- W2000572085 hasAuthorship W2000572085A5029337942 @default.
- W2000572085 hasAuthorship W2000572085A5043471091 @default.
- W2000572085 hasAuthorship W2000572085A5048964248 @default.
- W2000572085 hasAuthorship W2000572085A5053249537 @default.
- W2000572085 hasAuthorship W2000572085A5061793560 @default.
- W2000572085 hasAuthorship W2000572085A5070431285 @default.
- W2000572085 hasAuthorship W2000572085A5070859075 @default.
- W2000572085 hasAuthorship W2000572085A5074625131 @default.
- W2000572085 hasAuthorship W2000572085A5088026277 @default.
- W2000572085 hasConcept C111368507 @default.
- W2000572085 hasConcept C120665830 @default.
- W2000572085 hasConcept C121332964 @default.
- W2000572085 hasConcept C127313418 @default.
- W2000572085 hasConcept C136959337 @default.
- W2000572085 hasConcept C138268822 @default.
- W2000572085 hasConcept C154945302 @default.
- W2000572085 hasConcept C160671074 @default.
- W2000572085 hasConcept C168834538 @default.
- W2000572085 hasConcept C192562407 @default.
- W2000572085 hasConcept C207114421 @default.
- W2000572085 hasConcept C2776432867 @default.
- W2000572085 hasConcept C2777152588 @default.
- W2000572085 hasConcept C2777289219 @default.
- W2000572085 hasConcept C2779328170 @default.
- W2000572085 hasConcept C41008148 @default.
- W2000572085 hasConcept C49040817 @default.
- W2000572085 hasConcept C89957378 @default.
- W2000572085 hasConceptScore W2000572085C111368507 @default.
- W2000572085 hasConceptScore W2000572085C120665830 @default.
- W2000572085 hasConceptScore W2000572085C121332964 @default.
- W2000572085 hasConceptScore W2000572085C127313418 @default.
- W2000572085 hasConceptScore W2000572085C136959337 @default.
- W2000572085 hasConceptScore W2000572085C138268822 @default.
- W2000572085 hasConceptScore W2000572085C154945302 @default.
- W2000572085 hasConceptScore W2000572085C160671074 @default.
- W2000572085 hasConceptScore W2000572085C168834538 @default.
- W2000572085 hasConceptScore W2000572085C192562407 @default.
- W2000572085 hasConceptScore W2000572085C207114421 @default.
- W2000572085 hasConceptScore W2000572085C2776432867 @default.
- W2000572085 hasConceptScore W2000572085C2777152588 @default.
- W2000572085 hasConceptScore W2000572085C2777289219 @default.
- W2000572085 hasConceptScore W2000572085C2779328170 @default.
- W2000572085 hasConceptScore W2000572085C41008148 @default.
- W2000572085 hasConceptScore W2000572085C49040817 @default.
- W2000572085 hasConceptScore W2000572085C89957378 @default.
- W2000572085 hasLocation W20005720851 @default.
- W2000572085 hasOpenAccess W2000572085 @default.
- W2000572085 hasPrimaryLocation W20005720851 @default.
- W2000572085 hasRelatedWork W2000217432 @default.
- W2000572085 hasRelatedWork W2000572085 @default.
- W2000572085 hasRelatedWork W2041962322 @default.
- W2000572085 hasRelatedWork W2059536946 @default.
- W2000572085 hasRelatedWork W2068286834 @default.
- W2000572085 hasRelatedWork W2084754556 @default.
- W2000572085 hasRelatedWork W2095261131 @default.
- W2000572085 hasRelatedWork W2104591134 @default.
- W2000572085 hasRelatedWork W2176866608 @default.
- W2000572085 hasRelatedWork W3140385654 @default.
- W2000572085 hasVolume "467-468" @default.
- W2000572085 isParatext "false" @default.
- W2000572085 isRetracted "false" @default.
- W2000572085 magId "2000572085" @default.