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- W2000595253 abstract "We propose a thermal transient response due to Joule heating and its modeling in Cu/low-κ interconnects. By incorporating a shape parameter on the model, the observed thermal response is more accurately represented compared to the conventional exponential function model. The effective thermal time constant in multilayered Cu/low-κ interconnects is experimentally investigated on the basis of the transient thermal response." @default.
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- W2000595253 date "2012-05-01" @default.
- W2000595253 modified "2023-09-26" @default.
- W2000595253 title "Thermal Transient Response and Its Modeling for Joule Heating in Cu/Low-κ Interconnects Under Pulsed Current" @default.
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- W2000595253 doi "https://doi.org/10.1143/jjap.51.05ec06" @default.
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