Matches in SemOpenAlex for { <https://semopenalex.org/work/W2000598978> ?p ?o ?g. }
Showing items 1 to 66 of
66
with 100 items per page.
- W2000598978 endingPage "709" @default.
- W2000598978 startingPage "705" @default.
- W2000598978 abstract "The growth of ultrathin oxides of silicon (<5 nm) under low thermal budgets is extremely important in the context of ultralarge scale integration. One of the important factors that influence the growth and quality of the ultrathin oxide is the surface preparation of silicon prior to oxidation. In the present paper, the surface of p-type silicon (with (100) orientation) is prepared by three methods: (i) normal cleaning, (ii) chemical polishing and (iii) sacrificial oxide growth. The ultrathin oxide (in the range 2.0 to 2.5 nm) is grown by a low temperature (600 °C), wet oxidation (0.3 atm of water vapour pressure) technique. These ultrathin oxides are characterized for their electrical properties by fabricating aluminium-thin SiO2-Si tunnel diodes employing conventional current-voltage (I-V) and capacitance-voltage (C-V) techniques. The results indicate that the ultrathin oxides grown on the samples prepared by the `sacrificial oxide growth' method give better oxide quality and uniformity; these results may be supported from the information in the literature that the sacrificial oxide reduces the roughness of the silicon surface." @default.
- W2000598978 created "2016-06-24" @default.
- W2000598978 creator A5019898029 @default.
- W2000598978 creator A5068038193 @default.
- W2000598978 creator A5087605447 @default.
- W2000598978 date "1999-01-01" @default.
- W2000598978 modified "2023-09-26" @default.
- W2000598978 title "Effect of pre-oxidation surface preparation on the growth of ultrathin oxides of silicon" @default.
- W2000598978 cites W1991401244 @default.
- W2000598978 cites W1991458647 @default.
- W2000598978 cites W2003318975 @default.
- W2000598978 cites W2017093327 @default.
- W2000598978 cites W2023020256 @default.
- W2000598978 cites W2035757035 @default.
- W2000598978 cites W2055639069 @default.
- W2000598978 cites W2074622604 @default.
- W2000598978 cites W2074821454 @default.
- W2000598978 cites W2090166502 @default.
- W2000598978 cites W2122069071 @default.
- W2000598978 cites W2139554698 @default.
- W2000598978 cites W2148582071 @default.
- W2000598978 cites W2151946384 @default.
- W2000598978 doi "https://doi.org/10.1088/0268-1242/14/8/307" @default.
- W2000598978 hasPublicationYear "1999" @default.
- W2000598978 type Work @default.
- W2000598978 sameAs 2000598978 @default.
- W2000598978 citedByCount "7" @default.
- W2000598978 crossrefType "journal-article" @default.
- W2000598978 hasAuthorship W2000598978A5019898029 @default.
- W2000598978 hasAuthorship W2000598978A5068038193 @default.
- W2000598978 hasAuthorship W2000598978A5087605447 @default.
- W2000598978 hasConcept C127413603 @default.
- W2000598978 hasConcept C171250308 @default.
- W2000598978 hasConcept C185592680 @default.
- W2000598978 hasConcept C191897082 @default.
- W2000598978 hasConcept C192562407 @default.
- W2000598978 hasConcept C42360764 @default.
- W2000598978 hasConcept C544956773 @default.
- W2000598978 hasConceptScore W2000598978C127413603 @default.
- W2000598978 hasConceptScore W2000598978C171250308 @default.
- W2000598978 hasConceptScore W2000598978C185592680 @default.
- W2000598978 hasConceptScore W2000598978C191897082 @default.
- W2000598978 hasConceptScore W2000598978C192562407 @default.
- W2000598978 hasConceptScore W2000598978C42360764 @default.
- W2000598978 hasConceptScore W2000598978C544956773 @default.
- W2000598978 hasIssue "8" @default.
- W2000598978 hasLocation W20005989781 @default.
- W2000598978 hasOpenAccess W2000598978 @default.
- W2000598978 hasPrimaryLocation W20005989781 @default.
- W2000598978 hasRelatedWork W1989803592 @default.
- W2000598978 hasRelatedWork W2119454944 @default.
- W2000598978 hasRelatedWork W2185121890 @default.
- W2000598978 hasRelatedWork W2312552982 @default.
- W2000598978 hasRelatedWork W2385526732 @default.
- W2000598978 hasRelatedWork W2585249750 @default.
- W2000598978 hasRelatedWork W2748952813 @default.
- W2000598978 hasRelatedWork W2805734131 @default.
- W2000598978 hasRelatedWork W2899084033 @default.
- W2000598978 hasRelatedWork W2949628751 @default.
- W2000598978 hasVolume "14" @default.
- W2000598978 isParatext "false" @default.
- W2000598978 isRetracted "false" @default.
- W2000598978 magId "2000598978" @default.
- W2000598978 workType "article" @default.