FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2000599099> ?p ?o ?g. }

• W2000599099 endingPage "1633" @default.
• W2000599099 startingPage "1621" @default.
• W2000599099 abstract "Micro-electro-mechanical systems (MEMS) are commonly constituted by suspended structures such as beams and spring-supported plates and are applied in a wide range of fields such as sensing, optics, radio frequency communications, fluidics, biology, etc. The components that form the basis of MEMS devices are often actuated using electrostatic capacitive strategy, and performances are improved by the micro-scale dielectric gap between the electrodes. The dynamic dimensioning and characterization are made more complicated by the nonlinearity of the electrostatic actuation and by the electro-mechanical coupling, which involves the capacitive force and the elastic reaction of the structure. The dynamic characterization is affected by specific problems related to electro-mechanical coupling, which need a dedicated approach. Some of the effects that take place during the dynamic tests on electrostatically actuated MEMS are studied in this work and are described using compact analytic models; using the proposed approaches, results of experiments in the presence of electro-mechanical coupled domains can be predicted and interpreted correctly. Structural properties such as residual stress or strain dependent on the fabrication process may influence the measurements in both, the static and dynamic fields. The goal of this study is to describe the most common experimental problems related to the dynamic characterization of electrostatically actuated microsystems; theoretical approaches that are able to describe the effects involved are proposed to predict and interpret experimental results." @default.
• W2000599099 created "2016-06-24" @default.
• W2000599099 creator A5050846547 @default.
• W2000599099 creator A5060169443 @default.
• W2000599099 date "2010-08-01" @default.
• W2000599099 modified "2023-10-04" @default.
• W2000599099 title "Dynamic identification of electrostatically actuated MEMS in the frequency domain" @default.
• W2000599099 cites W1963773365 @default.
• W2000599099 cites W1975244512 @default.
• W2000599099 cites W1989076755 @default.
• W2000599099 cites W1994893200 @default.
• W2000599099 cites W2006884215 @default.
• W2000599099 cites W2010277293 @default.
• W2000599099 cites W2022720989 @default.
• W2000599099 cites W2025420958 @default.
• W2000599099 cites W2037771108 @default.
• W2000599099 cites W2046938814 @default.
• W2000599099 cites W2096591541 @default.
• W2000599099 cites W2098530728 @default.
• W2000599099 cites W2116357047 @default.
• W2000599099 cites W2121797911 @default.
• W2000599099 cites W2131467825 @default.
• W2000599099 cites W2147473057 @default.
• W2000599099 cites W2160231789 @default.
• W2000599099 cites W2165091983 @default.
• W2000599099 cites W2168565380 @default.
• W2000599099 doi "https://doi.org/10.1016/j.ymssp.2010.01.010" @default.
• W2000599099 hasPublicationYear "2010" @default.
• W2000599099 type Work @default.
• W2000599099 sameAs 2000599099 @default.
• W2000599099 citedByCount "33" @default.
• W2000599099 countsByYear W20005990992012 @default.
• W2000599099 countsByYear W20005990992013 @default.
• W2000599099 countsByYear W20005990992014 @default.
• W2000599099 countsByYear W20005990992015 @default.
• W2000599099 countsByYear W20005990992016 @default.
• W2000599099 countsByYear W20005990992017 @default.
• W2000599099 countsByYear W20005990992018 @default.
• W2000599099 countsByYear W20005990992019 @default.
• W2000599099 countsByYear W20005990992020 @default.
• W2000599099 countsByYear W20005990992021 @default.
• W2000599099 countsByYear W20005990992022 @default.
• W2000599099 countsByYear W20005990992023 @default.
• W2000599099 crossrefType "journal-article" @default.
• W2000599099 hasAuthorship W2000599099A5050846547 @default.
• W2000599099 hasAuthorship W2000599099A5060169443 @default.
• W2000599099 hasConcept C119599485 @default.
• W2000599099 hasConcept C121332964 @default.
• W2000599099 hasConcept C127413603 @default.
• W2000599099 hasConcept C131584629 @default.
• W2000599099 hasConcept C132651336 @default.
• W2000599099 hasConcept C136525101 @default.
• W2000599099 hasConcept C142724271 @default.
• W2000599099 hasConcept C145667562 @default.
• W2000599099 hasConcept C146978453 @default.
• W2000599099 hasConcept C151054161 @default.
• W2000599099 hasConcept C158622935 @default.
• W2000599099 hasConcept C171250308 @default.
• W2000599099 hasConcept C172707124 @default.
• W2000599099 hasConcept C192562407 @default.
• W2000599099 hasConcept C204787440 @default.
• W2000599099 hasConcept C206755178 @default.
• W2000599099 hasConcept C24326235 @default.
• W2000599099 hasConcept C2780841128 @default.
• W2000599099 hasConcept C28826006 @default.
• W2000599099 hasConcept C33923547 @default.
• W2000599099 hasConcept C37977207 @default.
• W2000599099 hasConcept C48209547 @default.
• W2000599099 hasConcept C62520636 @default.
• W2000599099 hasConcept C71924100 @default.
• W2000599099 hasConcept C78519656 @default.
• W2000599099 hasConcept C89714869 @default.
• W2000599099 hasConceptScore W2000599099C119599485 @default.
• W2000599099 hasConceptScore W2000599099C121332964 @default.
• W2000599099 hasConceptScore W2000599099C127413603 @default.
• W2000599099 hasConceptScore W2000599099C131584629 @default.
• W2000599099 hasConceptScore W2000599099C132651336 @default.
• W2000599099 hasConceptScore W2000599099C136525101 @default.
• W2000599099 hasConceptScore W2000599099C142724271 @default.
• W2000599099 hasConceptScore W2000599099C145667562 @default.
• W2000599099 hasConceptScore W2000599099C146978453 @default.
• W2000599099 hasConceptScore W2000599099C151054161 @default.
• W2000599099 hasConceptScore W2000599099C158622935 @default.
• W2000599099 hasConceptScore W2000599099C171250308 @default.
• W2000599099 hasConceptScore W2000599099C172707124 @default.
• W2000599099 hasConceptScore W2000599099C192562407 @default.
• W2000599099 hasConceptScore W2000599099C204787440 @default.
• W2000599099 hasConceptScore W2000599099C206755178 @default.
• W2000599099 hasConceptScore W2000599099C24326235 @default.
• W2000599099 hasConceptScore W2000599099C2780841128 @default.
• W2000599099 hasConceptScore W2000599099C28826006 @default.
• W2000599099 hasConceptScore W2000599099C33923547 @default.
• W2000599099 hasConceptScore W2000599099C37977207 @default.
• W2000599099 hasConceptScore W2000599099C48209547 @default.
• W2000599099 hasConceptScore W2000599099C62520636 @default.
• W2000599099 hasConceptScore W2000599099C71924100 @default.
• W2000599099 hasConceptScore W2000599099C78519656 @default.
• W2000599099 hasConceptScore W2000599099C89714869 @default.

• next