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- W2000600473 abstract "The experiments confirm that the charge to breakdown Q<SUB>BD</SUB>, often used for oxide monitoring, is closely related to the positive space charge formed in the bulk of the oxide layer during electron injections. The results are justified by assuming that breakdown occurs when a critical net and effective number of charges per unit area, N<SUB>C</SUB> equals 5 10<SUP>12</SUP> cm<SUP>-2</SUP>, is reached in SiO<SUB>2</SUB> layers. An interpretation of breakdown induced by a positive charge is proposed, based on the polarization/relaxation process previously used to explain the electron charge induced breakdown process." @default.
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- W2000600473 date "1995-09-22" @default.
- W2000600473 modified "2023-10-16" @default.
- W2000600473 title "Correlation between space charge created by Fowler-Nordheim electron injections and charge to breakdown (Q BD ) of gate oxides in MOS capacitors: modeling and experiment" @default.
- W2000600473 doi "https://doi.org/10.1117/12.221437" @default.
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