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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2000603139> ?p ?o ?g. }

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• W2000603139 abstract "The etching of uranium oxide films was investigated with a non-thermal, atmospheric pressure plasma fed with a mixture of 2.0 kPa carbon tetrafluoride, 880.0 Pa oxygen and 97.2 kPa helium. Etching rates of up to 4.0 μm/min were recorded at a 200 °C sample temperature. X-ray photoemission spectroscopy revealed that the etched surface was highly fluorinated, containing UOF4 species during the etching process. An average surface reaction rate was estimated to be 1.9 × 1019 UF6 molecules/m2 s." @default.
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• W2000603139 date "2004-01-01" @default.
• W2000603139 modified "2023-09-23" @default.
• W2000603139 title "Etching of uranium oxide with a non-thermal, atmospheric pressure plasma" @default.
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• W2000603139 doi "https://doi.org/10.1016/j.jnucmat.2003.09.012" @default.
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