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- W2000607003 abstract "<para xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink> A microelectromechanical system (MEMS)-based optical accelerometer combined with a microfiber knot resonator (MKR) is proposed and demonstrated. The 386-<formula formulatype=inline><tex Notation=TeX>$mu$</tex></formula>m-diameter MKR, fabricated by a 1.1-<formula formulatype=inline><tex Notation=TeX>$mu$</tex> </formula>m-diameter microfiber, has a high quality factor (<formula formulatype=inline> <tex Notation=TeX>$Q$</tex></formula>-factor) of 8500 and acts as the sensing device for vibration measurement of the MEMS structure. The experimental results show that such an accelerometer has a sensitivity of 654.7 mV/g, and a dynamic range of 20 g. This sensitivity can be further improved by increasing the <formula formulatype=inline><tex Notation=TeX>$Q$</tex></formula>-factor of the MKR, which can be achieved by optimizing the optical and geometrical parameters of the microfiber. </para>" @default.
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- W2000607003 date "2009-10-01" @default.
- W2000607003 modified "2023-09-27" @default.
- W2000607003 title "MOEMS Accelerometer Based on Microfiber Knot Resonator" @default.
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- W2000607003 doi "https://doi.org/10.1109/lpt.2009.2029556" @default.
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