FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2000618296> ?p ?o ?g. }

• W2000618296 abstract "We have investigated the diffusion kinetics of Hf in TiN/HfSiO gate stacks. The Hf upward diffusion is found to be independent of interfacial SiO <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sub> growth, but depends on the amount of oxygen in the gate stacks. It is also revealed that Hf diffusion into TiN electrode occurs at above 650°C and leads to high-k degradation." @default.
• W2000618296 created "2016-06-24" @default.
• W2000618296 creator A5000177152 @default.
• W2000618296 creator A5001327940 @default.
• W2000618296 creator A5005695208 @default.
• W2000618296 creator A5008942687 @default.
• W2000618296 creator A5021943103 @default.
• W2000618296 creator A5056128134 @default.
• W2000618296 creator A5065080977 @default.
• W2000618296 date "2012-06-01" @default.
• W2000618296 modified "2023-09-27" @default.
• W2000618296 title "Oxygen-induced high-k degradation in TiN/HfSiO gate stacks" @default.
• W2000618296 cites W1995409337 @default.
• W2000618296 cites W2013666489 @default.
• W2000618296 cites W2067735540 @default.
• W2000618296 cites W2069431943 @default.
• W2000618296 cites W2085536352 @default.
• W2000618296 doi "https://doi.org/10.1109/snw.2012.6243358" @default.
• W2000618296 hasPublicationYear "2012" @default.
• W2000618296 type Work @default.
• W2000618296 sameAs 2000618296 @default.
• W2000618296 citedByCount "2" @default.
• W2000618296 countsByYear W20006182962014 @default.
• W2000618296 crossrefType "proceedings-article" @default.
• W2000618296 hasAuthorship W2000618296A5000177152 @default.
• W2000618296 hasAuthorship W2000618296A5001327940 @default.
• W2000618296 hasAuthorship W2000618296A5005695208 @default.
• W2000618296 hasAuthorship W2000618296A5008942687 @default.
• W2000618296 hasAuthorship W2000618296A5021943103 @default.
• W2000618296 hasAuthorship W2000618296A5056128134 @default.
• W2000618296 hasAuthorship W2000618296A5065080977 @default.
• W2000618296 hasConcept C119599485 @default.
• W2000618296 hasConcept C121332964 @default.
• W2000618296 hasConcept C127413603 @default.
• W2000618296 hasConcept C147789679 @default.
• W2000618296 hasConcept C148898269 @default.
• W2000618296 hasConcept C165801399 @default.
• W2000618296 hasConcept C171250308 @default.
• W2000618296 hasConcept C172385210 @default.
• W2000618296 hasConcept C17525397 @default.
• W2000618296 hasConcept C178790620 @default.
• W2000618296 hasConcept C185592680 @default.
• W2000618296 hasConcept C191897082 @default.
• W2000618296 hasConcept C192562407 @default.
• W2000618296 hasConcept C2361726 @default.
• W2000618296 hasConcept C24326235 @default.
• W2000618296 hasConcept C2778836790 @default.
• W2000618296 hasConcept C2779227376 @default.
• W2000618296 hasConcept C2779679103 @default.
• W2000618296 hasConcept C51140833 @default.
• W2000618296 hasConcept C525849907 @default.
• W2000618296 hasConcept C540031477 @default.
• W2000618296 hasConcept C62520636 @default.
• W2000618296 hasConcept C69357855 @default.
• W2000618296 hasConcept C97355855 @default.
• W2000618296 hasConceptScore W2000618296C119599485 @default.
• W2000618296 hasConceptScore W2000618296C121332964 @default.
• W2000618296 hasConceptScore W2000618296C127413603 @default.
• W2000618296 hasConceptScore W2000618296C147789679 @default.
• W2000618296 hasConceptScore W2000618296C148898269 @default.
• W2000618296 hasConceptScore W2000618296C165801399 @default.
• W2000618296 hasConceptScore W2000618296C171250308 @default.
• W2000618296 hasConceptScore W2000618296C172385210 @default.
• W2000618296 hasConceptScore W2000618296C17525397 @default.
• W2000618296 hasConceptScore W2000618296C178790620 @default.
• W2000618296 hasConceptScore W2000618296C185592680 @default.
• W2000618296 hasConceptScore W2000618296C191897082 @default.
• W2000618296 hasConceptScore W2000618296C192562407 @default.
• W2000618296 hasConceptScore W2000618296C2361726 @default.
• W2000618296 hasConceptScore W2000618296C24326235 @default.
• W2000618296 hasConceptScore W2000618296C2778836790 @default.
• W2000618296 hasConceptScore W2000618296C2779227376 @default.
• W2000618296 hasConceptScore W2000618296C2779679103 @default.
• W2000618296 hasConceptScore W2000618296C51140833 @default.
• W2000618296 hasConceptScore W2000618296C525849907 @default.
• W2000618296 hasConceptScore W2000618296C540031477 @default.
• W2000618296 hasConceptScore W2000618296C62520636 @default.
• W2000618296 hasConceptScore W2000618296C69357855 @default.
• W2000618296 hasConceptScore W2000618296C97355855 @default.
• W2000618296 hasLocation W20006182961 @default.
• W2000618296 hasOpenAccess W2000618296 @default.
• W2000618296 hasPrimaryLocation W20006182961 @default.
• W2000618296 hasRelatedWork W1490375199 @default.
• W2000618296 hasRelatedWork W1516192784 @default.
• W2000618296 hasRelatedWork W1516790507 @default.
• W2000618296 hasRelatedWork W1606479390 @default.
• W2000618296 hasRelatedWork W2007722083 @default.
• W2000618296 hasRelatedWork W2013666489 @default.
• W2000618296 hasRelatedWork W2016727796 @default.
• W2000618296 hasRelatedWork W2038465660 @default.
• W2000618296 hasRelatedWork W2064508133 @default.
• W2000618296 hasRelatedWork W2065094821 @default.
• W2000618296 hasRelatedWork W2066283267 @default.
• W2000618296 hasRelatedWork W2073463991 @default.
• W2000618296 hasRelatedWork W2123748858 @default.
• W2000618296 hasRelatedWork W2141019383 @default.
• W2000618296 hasRelatedWork W2149666898 @default.
• W2000618296 hasRelatedWork W2541954436 @default.
• W2000618296 hasRelatedWork W2625705226 @default.
• W2000618296 hasRelatedWork W2748504467 @default.

• next