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- W2000620740 abstract "As ArF lithography continues to mature, it can be expected that, KrF lithography combined with reticle and illumination enhancements will be preferred techniques, for cost- effective 130-nm node, in particular for low-end microprocessors, random logic and DRAM designs. There are tow main enhancement routes to extend KrF lithography. The first one entails the use of alternating phase shift masks." @default.
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- W2000620740 date "2000-07-05" @default.
- W2000620740 modified "2023-10-01" @default.
- W2000620740 title "KrF lithography for 130 nm" @default.
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- W2000620740 doi "https://doi.org/10.1117/12.389002" @default.
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