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- W2000652296 abstract "A Cat-CVD (catalytic chemical vapor deposition, Hot-Wire CVD) apparatus for deposition of large area substrates is developed. Technical issues for a large area deposition apparatus are pointed out and the way to solve such issues is demonstrated, along with deposition performance. It is shown that a large area deposition apparatus as a prototype of future mass-production machine is realized by using the Cat-CVD technology." @default.
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- W2000652296 date "2006-04-01" @default.
- W2000652296 modified "2023-10-17" @default.
- W2000652296 title "Development of catalytic chemical vapor deposition apparatus for large size substrates" @default.
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- W2000652296 doi "https://doi.org/10.1016/j.tsf.2005.07.266" @default.
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