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- W2000665748 abstract "Boron implanted (B 5 keV 3×1015 cm−2) Si wafers before and after rapid thermal annealing (RTA) were characterized using multi‐wavelength Raman spectroscopy and photoluminescence (PL) measurement techniques. Strong correlation among Raman, PL spectra and RTA conditions are observed. By selecting appropriate excitation wavelengths, approximate dopant profiles, crystallinity, dopant activation, and location and density of non‐radiative recombination centers (originated by defects and damage) of B implanted wafers were successfully characterized by Raman and PL measurements without making contact. Multi‐wavelength Raman and PL can provide advantages as inline process and material monitoring techniques in addition to conventional characterization techniques." @default.
- W2000665748 created "2016-06-24" @default.
- W2000665748 creator A5017125210 @default.
- W2000665748 creator A5043267169 @default.
- W2000665748 creator A5048046206 @default.
- W2000665748 creator A5056082957 @default.
- W2000665748 date "2011-01-01" @default.
- W2000665748 modified "2023-09-23" @default.
- W2000665748 title "Multi-Wavelength Raman and Photoluminescence Characterization of Implanted Silicon Before and After Rapid Thermal Annealing" @default.
- W2000665748 cites W2086103622 @default.
- W2000665748 doi "https://doi.org/10.1063/1.3548350" @default.
- W2000665748 hasPublicationYear "2011" @default.
- W2000665748 type Work @default.
- W2000665748 sameAs 2000665748 @default.
- W2000665748 citedByCount "6" @default.
- W2000665748 countsByYear W20006657482012 @default.
- W2000665748 countsByYear W20006657482014 @default.
- W2000665748 countsByYear W20006657482015 @default.
- W2000665748 countsByYear W20006657482018 @default.
- W2000665748 crossrefType "proceedings-article" @default.
- W2000665748 hasAuthorship W2000665748A5017125210 @default.
- W2000665748 hasAuthorship W2000665748A5043267169 @default.
- W2000665748 hasAuthorship W2000665748A5048046206 @default.
- W2000665748 hasAuthorship W2000665748A5056082957 @default.
- W2000665748 hasConcept C113196181 @default.
- W2000665748 hasConcept C120665830 @default.
- W2000665748 hasConcept C121332964 @default.
- W2000665748 hasConcept C159985019 @default.
- W2000665748 hasConcept C160671074 @default.
- W2000665748 hasConcept C178790620 @default.
- W2000665748 hasConcept C185592680 @default.
- W2000665748 hasConcept C191952053 @default.
- W2000665748 hasConcept C192562407 @default.
- W2000665748 hasConcept C2777855556 @default.
- W2000665748 hasConcept C2780081452 @default.
- W2000665748 hasConcept C40003534 @default.
- W2000665748 hasConcept C43617362 @default.
- W2000665748 hasConcept C46275449 @default.
- W2000665748 hasConcept C49040817 @default.
- W2000665748 hasConcept C501308230 @default.
- W2000665748 hasConcept C544956773 @default.
- W2000665748 hasConcept C57863236 @default.
- W2000665748 hasConcept C6260449 @default.
- W2000665748 hasConcept C85080765 @default.
- W2000665748 hasConceptScore W2000665748C113196181 @default.
- W2000665748 hasConceptScore W2000665748C120665830 @default.
- W2000665748 hasConceptScore W2000665748C121332964 @default.
- W2000665748 hasConceptScore W2000665748C159985019 @default.
- W2000665748 hasConceptScore W2000665748C160671074 @default.
- W2000665748 hasConceptScore W2000665748C178790620 @default.
- W2000665748 hasConceptScore W2000665748C185592680 @default.
- W2000665748 hasConceptScore W2000665748C191952053 @default.
- W2000665748 hasConceptScore W2000665748C192562407 @default.
- W2000665748 hasConceptScore W2000665748C2777855556 @default.
- W2000665748 hasConceptScore W2000665748C2780081452 @default.
- W2000665748 hasConceptScore W2000665748C40003534 @default.
- W2000665748 hasConceptScore W2000665748C43617362 @default.
- W2000665748 hasConceptScore W2000665748C46275449 @default.
- W2000665748 hasConceptScore W2000665748C49040817 @default.
- W2000665748 hasConceptScore W2000665748C501308230 @default.
- W2000665748 hasConceptScore W2000665748C544956773 @default.
- W2000665748 hasConceptScore W2000665748C57863236 @default.
- W2000665748 hasConceptScore W2000665748C6260449 @default.
- W2000665748 hasConceptScore W2000665748C85080765 @default.
- W2000665748 hasLocation W20006657481 @default.
- W2000665748 hasOpenAccess W2000665748 @default.
- W2000665748 hasPrimaryLocation W20006657481 @default.
- W2000665748 hasRelatedWork W1544109952 @default.
- W2000665748 hasRelatedWork W1966205888 @default.
- W2000665748 hasRelatedWork W1993005035 @default.
- W2000665748 hasRelatedWork W2052759331 @default.
- W2000665748 hasRelatedWork W2074313314 @default.
- W2000665748 hasRelatedWork W2107810710 @default.
- W2000665748 hasRelatedWork W2162681036 @default.
- W2000665748 hasRelatedWork W2391328043 @default.
- W2000665748 hasRelatedWork W2949852474 @default.
- W2000665748 hasRelatedWork W2086742598 @default.
- W2000665748 isParatext "false" @default.
- W2000665748 isRetracted "false" @default.
- W2000665748 magId "2000665748" @default.
- W2000665748 workType "article" @default.