Matches in SemOpenAlex for { <https://semopenalex.org/work/W2000688069> ?p ?o ?g. }
Showing items 1 to 85 of
85
with 100 items per page.
- W2000688069 endingPage "304" @default.
- W2000688069 startingPage "299" @default.
- W2000688069 abstract "Ion bombardment or backsputtering of SiO2 films has been shown to result in severe insulator degradation in device processing. Here we have investigated the effects of low-energy neutral-particle bombardment on device quality SiO2 films and have compared degradation produced by neutral-particle bombardment with that produced by ion bombardment. These results show that (1) neutral-particle bombardment produces substantially less (by two or three orders of magnitude) fixed charge at the SiO2/Si interface than does ion bombardment; (2) the most prominent degradation produced by neutral bombardment is the creation of a large interface state density across the band gap which is not related to a nonuniform charge distribution at the interface; (3) metal-oxide-semiconductor degradation produced by neutral bombardment may be removed by annealing at temperatures ?400 °C. Comparison of oxide charge degradation produced in SiO2 by ion and neutral-particle bombardment suggests that the neutralization processes at the vacuum-SiO2 interface, which take place only in ion bombardment, have the dominant role in this degradation. As a result of these processes, in ion bombarded samples, charge carriers migrate to the SiO2/Si interface in the field across the oxide film. This mechanism is absent in the case of neutral bombardment." @default.
- W2000688069 created "2016-06-24" @default.
- W2000688069 creator A5034937693 @default.
- W2000688069 creator A5058180263 @default.
- W2000688069 creator A5066278517 @default.
- W2000688069 creator A5089911516 @default.
- W2000688069 date "1980-01-01" @default.
- W2000688069 modified "2023-09-26" @default.
- W2000688069 title "Effects of bombardment by low‐energy neutral particles on silicon dioxide films" @default.
- W2000688069 cites W1966258424 @default.
- W2000688069 cites W1984668254 @default.
- W2000688069 cites W2002697410 @default.
- W2000688069 cites W2007112687 @default.
- W2000688069 cites W2010058056 @default.
- W2000688069 cites W2015443436 @default.
- W2000688069 cites W2046942087 @default.
- W2000688069 cites W2051184557 @default.
- W2000688069 cites W2080836421 @default.
- W2000688069 cites W2091446076 @default.
- W2000688069 cites W2093198617 @default.
- W2000688069 cites W2094147667 @default.
- W2000688069 doi "https://doi.org/10.1063/1.327370" @default.
- W2000688069 hasPublicationYear "1980" @default.
- W2000688069 type Work @default.
- W2000688069 sameAs 2000688069 @default.
- W2000688069 citedByCount "8" @default.
- W2000688069 countsByYear W20006880692015 @default.
- W2000688069 countsByYear W20006880692018 @default.
- W2000688069 crossrefType "journal-article" @default.
- W2000688069 hasAuthorship W2000688069A5034937693 @default.
- W2000688069 hasAuthorship W2000688069A5058180263 @default.
- W2000688069 hasAuthorship W2000688069A5066278517 @default.
- W2000688069 hasAuthorship W2000688069A5089911516 @default.
- W2000688069 hasBestOaLocation W20006880691 @default.
- W2000688069 hasConcept C113196181 @default.
- W2000688069 hasConcept C121332964 @default.
- W2000688069 hasConcept C145148216 @default.
- W2000688069 hasConcept C159985019 @default.
- W2000688069 hasConcept C178790620 @default.
- W2000688069 hasConcept C184779094 @default.
- W2000688069 hasConcept C185592680 @default.
- W2000688069 hasConcept C191897082 @default.
- W2000688069 hasConcept C192562407 @default.
- W2000688069 hasConcept C2777855556 @default.
- W2000688069 hasConcept C2779851234 @default.
- W2000688069 hasConcept C2985496409 @default.
- W2000688069 hasConcept C43617362 @default.
- W2000688069 hasConcept C49040817 @default.
- W2000688069 hasConcept C544956773 @default.
- W2000688069 hasConceptScore W2000688069C113196181 @default.
- W2000688069 hasConceptScore W2000688069C121332964 @default.
- W2000688069 hasConceptScore W2000688069C145148216 @default.
- W2000688069 hasConceptScore W2000688069C159985019 @default.
- W2000688069 hasConceptScore W2000688069C178790620 @default.
- W2000688069 hasConceptScore W2000688069C184779094 @default.
- W2000688069 hasConceptScore W2000688069C185592680 @default.
- W2000688069 hasConceptScore W2000688069C191897082 @default.
- W2000688069 hasConceptScore W2000688069C192562407 @default.
- W2000688069 hasConceptScore W2000688069C2777855556 @default.
- W2000688069 hasConceptScore W2000688069C2779851234 @default.
- W2000688069 hasConceptScore W2000688069C2985496409 @default.
- W2000688069 hasConceptScore W2000688069C43617362 @default.
- W2000688069 hasConceptScore W2000688069C49040817 @default.
- W2000688069 hasConceptScore W2000688069C544956773 @default.
- W2000688069 hasIssue "1" @default.
- W2000688069 hasLocation W20006880691 @default.
- W2000688069 hasOpenAccess W2000688069 @default.
- W2000688069 hasPrimaryLocation W20006880691 @default.
- W2000688069 hasRelatedWork W2042925312 @default.
- W2000688069 hasRelatedWork W2047459412 @default.
- W2000688069 hasRelatedWork W2063430564 @default.
- W2000688069 hasRelatedWork W2064355074 @default.
- W2000688069 hasRelatedWork W2092931996 @default.
- W2000688069 hasRelatedWork W2094221410 @default.
- W2000688069 hasRelatedWork W2347531304 @default.
- W2000688069 hasRelatedWork W2899084033 @default.
- W2000688069 hasRelatedWork W3196600710 @default.
- W2000688069 hasRelatedWork W4205510562 @default.
- W2000688069 hasVolume "51" @default.
- W2000688069 isParatext "false" @default.
- W2000688069 isRetracted "false" @default.
- W2000688069 magId "2000688069" @default.
- W2000688069 workType "article" @default.