FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2000694414> ?p ?o ?g. }

• W2000694414 endingPage "505205" @default.
• W2000694414 startingPage "505205" @default.
• W2000694414 abstract "Using Langmuir probe-assisted laser photodetachment, the temporal evolution of the O − density was determined in the bulk plasma of a unipolar pulsed-dc magnetron. The source was operated in reactive mode, at a fixed nominal on-time power of 100 W, sputtering Ti in argon–oxygen atmospheres at 1.3 Pa pressure, but over a variation of duty cycles from 5% to 50% and oxygen partial pressures of 10% and 50% of the total pressure. In the plasma on-time, for all duty cycles the negative ion density ( n − ) rises marginally reaching values typically less than 2 × 10 15 m −3 with negative ion-to-electron density ratios, α < 1. However, immediately after the transition from pulse on-to-off, n − falls by about 20–30% as fast O − species created at the cathode exit the system. This is followed by a rapid rise in n − to values at least 2 or 3 times that in the on-time. The rate of rise of n − and its maximum value both increase with decreasing duty cycle. In the off-time, the electron density falls rapidly (initial decay rates of several tens of μs), and therefore the afterglow plasma becomes highly electronegative, with α reaching 4.6 and 14.4 for 10% and 50% oxygen partial pressure, respectively. The rapid rise in n − in the afterglow (in which the electron temperature falls from about 5 to 0.5 eV) is attributed to the dissociative attachment of highly excited oxygen metastables, which themselves are created in the pulse on-time. At the lowest duty of 5%, the long-term O − decay times are several hundred μs. Langmuir probe characteristics show the clear signature that negative ions dominate over the electrons in the off-time. From the ion and electron saturation current ratios, α has been estimated in some chosen cases and found to agree within a factor between 2 and 10 with those obtained more directly from the photodetachment method." @default.
• W2000694414 created "2016-06-24" @default.
• W2000694414 creator A5018069752 @default.
• W2000694414 creator A5028700155 @default.
• W2000694414 creator A5043937715 @default.
• W2000694414 creator A5056836367 @default.
• W2000694414 date "2010-12-02" @default.
• W2000694414 modified "2023-10-03" @default.
• W2000694414 title "A study of the plasma electronegativity in an argon–oxygen pulsed-dc sputter magnetron" @default.
• W2000694414 cites W1508235409 @default.
• W2000694414 cites W1967735972 @default.
• W2000694414 cites W1980968722 @default.
• W2000694414 cites W1983388462 @default.
• W2000694414 cites W1986308089 @default.
• W2000694414 cites W1998412953 @default.
• W2000694414 cites W1998686147 @default.
• W2000694414 cites W2003262087 @default.
• W2000694414 cites W2008744161 @default.
• W2000694414 cites W2008846217 @default.
• W2000694414 cites W2018368287 @default.
• W2000694414 cites W2023212668 @default.
• W2000694414 cites W2028498027 @default.
• W2000694414 cites W2029479665 @default.
• W2000694414 cites W2044718312 @default.
• W2000694414 cites W2051515376 @default.
• W2000694414 cites W2064019319 @default.
• W2000694414 cites W2068750669 @default.
• W2000694414 cites W2072338475 @default.
• W2000694414 cites W2076559318 @default.
• W2000694414 cites W2078032127 @default.
• W2000694414 cites W2078391940 @default.
• W2000694414 cites W2080182142 @default.
• W2000694414 cites W2087094903 @default.
• W2000694414 cites W2089254012 @default.
• W2000694414 cites W2122840562 @default.
• W2000694414 cites W2125081145 @default.
• W2000694414 cites W2130544365 @default.
• W2000694414 doi "https://doi.org/10.1088/0022-3727/43/50/505205" @default.
• W2000694414 hasPublicationYear "2010" @default.
• W2000694414 type Work @default.
• W2000694414 sameAs 2000694414 @default.
• W2000694414 citedByCount "16" @default.
• W2000694414 countsByYear W20006944142013 @default.
• W2000694414 countsByYear W20006944142014 @default.
• W2000694414 countsByYear W20006944142015 @default.
• W2000694414 countsByYear W20006944142016 @default.
• W2000694414 countsByYear W20006944142017 @default.
• W2000694414 countsByYear W20006944142019 @default.
• W2000694414 countsByYear W20006944142020 @default.
• W2000694414 countsByYear W20006944142021 @default.
• W2000694414 countsByYear W20006944142023 @default.
• W2000694414 crossrefType "journal-article" @default.
• W2000694414 hasAuthorship W2000694414A5018069752 @default.
• W2000694414 hasAuthorship W2000694414A5028700155 @default.
• W2000694414 hasAuthorship W2000694414A5043937715 @default.
• W2000694414 hasAuthorship W2000694414A5056836367 @default.
• W2000694414 hasBestOaLocation W20006944142 @default.
• W2000694414 hasConcept C113196181 @default.
• W2000694414 hasConcept C121332964 @default.
• W2000694414 hasConcept C125485243 @default.
• W2000694414 hasConcept C1276947 @default.
• W2000694414 hasConcept C145148216 @default.
• W2000694414 hasConcept C165801399 @default.
• W2000694414 hasConcept C171250308 @default.
• W2000694414 hasConcept C17599544 @default.
• W2000694414 hasConcept C176118016 @default.
• W2000694414 hasConcept C177293861 @default.
• W2000694414 hasConcept C178790620 @default.
• W2000694414 hasConcept C181500209 @default.
• W2000694414 hasConcept C184779094 @default.
• W2000694414 hasConcept C185592680 @default.
• W2000694414 hasConcept C19067145 @default.
• W2000694414 hasConcept C192562407 @default.
• W2000694414 hasConcept C199822604 @default.
• W2000694414 hasConcept C22175881 @default.
• W2000694414 hasConcept C22423302 @default.
• W2000694414 hasConcept C2777036043 @default.
• W2000694414 hasConcept C2781083372 @default.
• W2000694414 hasConcept C43503373 @default.
• W2000694414 hasConcept C43617362 @default.
• W2000694414 hasConcept C540031477 @default.
• W2000694414 hasConcept C547737533 @default.
• W2000694414 hasConcept C61427134 @default.
• W2000694414 hasConcept C62520636 @default.
• W2000694414 hasConcept C68463220 @default.
• W2000694414 hasConcept C82706917 @default.
• W2000694414 hasConcept C97892325 @default.
• W2000694414 hasConceptScore W2000694414C113196181 @default.
• W2000694414 hasConceptScore W2000694414C121332964 @default.
• W2000694414 hasConceptScore W2000694414C125485243 @default.
• W2000694414 hasConceptScore W2000694414C1276947 @default.
• W2000694414 hasConceptScore W2000694414C145148216 @default.
• W2000694414 hasConceptScore W2000694414C165801399 @default.
• W2000694414 hasConceptScore W2000694414C171250308 @default.
• W2000694414 hasConceptScore W2000694414C17599544 @default.
• W2000694414 hasConceptScore W2000694414C176118016 @default.
• W2000694414 hasConceptScore W2000694414C177293861 @default.
• W2000694414 hasConceptScore W2000694414C178790620 @default.

• next