Matches in SemOpenAlex for { <https://semopenalex.org/work/W2000694847> ?p ?o ?g. }
Showing items 1 to 99 of
99
with 100 items per page.
- W2000694847 endingPage "500" @default.
- W2000694847 startingPage "495" @default.
- W2000694847 abstract "Thin oxide nitridation in N2O has been demonstrated to improve the dielectric characteristics in terms of charge to breakdown and trapping under current injection. In this work we compare the results obtained with the RTP and conventional oven nitridation technologies. Both reference oxide and nitrided oxide samples have been considered. Auger electron spectroscopy provided the nitrogen depth profiles. The electrical characterization has been performed by means of the constant current stress and exponential current ramp stress techniques, as well as high-frequency and quasi-static capacitance-voltage (C-V) measurements for interfacial state density determination as a function of the injected charge." @default.
- W2000694847 created "2016-06-24" @default.
- W2000694847 creator A5027057930 @default.
- W2000694847 creator A5037131907 @default.
- W2000694847 creator A5062196766 @default.
- W2000694847 date "1994-10-01" @default.
- W2000694847 modified "2023-09-23" @default.
- W2000694847 title "Thin SiO2 films nitrided in N2O" @default.
- W2000694847 cites W2067899053 @default.
- W2000694847 cites W2170259676 @default.
- W2000694847 doi "https://doi.org/10.1016/0026-2692(94)90033-7" @default.
- W2000694847 hasPublicationYear "1994" @default.
- W2000694847 type Work @default.
- W2000694847 sameAs 2000694847 @default.
- W2000694847 citedByCount "7" @default.
- W2000694847 countsByYear W20006948472019 @default.
- W2000694847 crossrefType "journal-article" @default.
- W2000694847 hasAuthorship W2000694847A5027057930 @default.
- W2000694847 hasAuthorship W2000694847A5037131907 @default.
- W2000694847 hasAuthorship W2000694847A5062196766 @default.
- W2000694847 hasConcept C113196181 @default.
- W2000694847 hasConcept C115235246 @default.
- W2000694847 hasConcept C119599485 @default.
- W2000694847 hasConcept C121332964 @default.
- W2000694847 hasConcept C127413603 @default.
- W2000694847 hasConcept C133386390 @default.
- W2000694847 hasConcept C13862629 @default.
- W2000694847 hasConcept C138885662 @default.
- W2000694847 hasConcept C147789679 @default.
- W2000694847 hasConcept C148043351 @default.
- W2000694847 hasConcept C171250308 @default.
- W2000694847 hasConcept C17525397 @default.
- W2000694847 hasConcept C178790620 @default.
- W2000694847 hasConcept C184779094 @default.
- W2000694847 hasConcept C185544564 @default.
- W2000694847 hasConcept C185592680 @default.
- W2000694847 hasConcept C19067145 @default.
- W2000694847 hasConcept C191897082 @default.
- W2000694847 hasConcept C192562407 @default.
- W2000694847 hasConcept C21036866 @default.
- W2000694847 hasConcept C25442681 @default.
- W2000694847 hasConcept C2779227376 @default.
- W2000694847 hasConcept C2779851234 @default.
- W2000694847 hasConcept C2780646311 @default.
- W2000694847 hasConcept C30066665 @default.
- W2000694847 hasConcept C41895202 @default.
- W2000694847 hasConcept C43617362 @default.
- W2000694847 hasConcept C49040817 @default.
- W2000694847 hasConcept C537208039 @default.
- W2000694847 hasConceptScore W2000694847C113196181 @default.
- W2000694847 hasConceptScore W2000694847C115235246 @default.
- W2000694847 hasConceptScore W2000694847C119599485 @default.
- W2000694847 hasConceptScore W2000694847C121332964 @default.
- W2000694847 hasConceptScore W2000694847C127413603 @default.
- W2000694847 hasConceptScore W2000694847C133386390 @default.
- W2000694847 hasConceptScore W2000694847C13862629 @default.
- W2000694847 hasConceptScore W2000694847C138885662 @default.
- W2000694847 hasConceptScore W2000694847C147789679 @default.
- W2000694847 hasConceptScore W2000694847C148043351 @default.
- W2000694847 hasConceptScore W2000694847C171250308 @default.
- W2000694847 hasConceptScore W2000694847C17525397 @default.
- W2000694847 hasConceptScore W2000694847C178790620 @default.
- W2000694847 hasConceptScore W2000694847C184779094 @default.
- W2000694847 hasConceptScore W2000694847C185544564 @default.
- W2000694847 hasConceptScore W2000694847C185592680 @default.
- W2000694847 hasConceptScore W2000694847C19067145 @default.
- W2000694847 hasConceptScore W2000694847C191897082 @default.
- W2000694847 hasConceptScore W2000694847C192562407 @default.
- W2000694847 hasConceptScore W2000694847C21036866 @default.
- W2000694847 hasConceptScore W2000694847C25442681 @default.
- W2000694847 hasConceptScore W2000694847C2779227376 @default.
- W2000694847 hasConceptScore W2000694847C2779851234 @default.
- W2000694847 hasConceptScore W2000694847C2780646311 @default.
- W2000694847 hasConceptScore W2000694847C30066665 @default.
- W2000694847 hasConceptScore W2000694847C41895202 @default.
- W2000694847 hasConceptScore W2000694847C43617362 @default.
- W2000694847 hasConceptScore W2000694847C49040817 @default.
- W2000694847 hasConceptScore W2000694847C537208039 @default.
- W2000694847 hasIssue "7" @default.
- W2000694847 hasLocation W20006948471 @default.
- W2000694847 hasOpenAccess W2000694847 @default.
- W2000694847 hasPrimaryLocation W20006948471 @default.
- W2000694847 hasRelatedWork W1981948190 @default.
- W2000694847 hasRelatedWork W1991829193 @default.
- W2000694847 hasRelatedWork W2000238188 @default.
- W2000694847 hasRelatedWork W2020970941 @default.
- W2000694847 hasRelatedWork W2047150929 @default.
- W2000694847 hasRelatedWork W2051137874 @default.
- W2000694847 hasRelatedWork W2090385264 @default.
- W2000694847 hasRelatedWork W2108666737 @default.
- W2000694847 hasRelatedWork W2148619272 @default.
- W2000694847 hasRelatedWork W2076300157 @default.
- W2000694847 hasVolume "25" @default.
- W2000694847 isParatext "false" @default.
- W2000694847 isRetracted "false" @default.
- W2000694847 magId "2000694847" @default.
- W2000694847 workType "article" @default.