Matches in SemOpenAlex for { <https://semopenalex.org/work/W2000697151> ?p ?o ?g. }
Showing items 1 to 81 of
81
with 100 items per page.
- W2000697151 endingPage "G79" @default.
- W2000697151 startingPage "G79" @default.
- W2000697151 abstract "The damage induced by damascene patterning to low permittivity dielectrics, even when limited to a region near the sidewalls, leads to a significant increase of the effective interline dielectric constant in narrow spaced interconnects. A figure of merit, the electrical equivalent sidewall damage, is suggested to estimate the extent of dielectric damage from interline capacitance measurements, enabling a prompt extrapolation of the impact of such damage on ultranarrow interline spacings. The application of this model to lines embedded in a microporous SiOC:H dielectric reveals the presence of an electrical equivalent sidewall damage of about 10 nm. © 2004 The Electrochemical Society. All rights reserved." @default.
- W2000697151 created "2016-06-24" @default.
- W2000697151 creator A5002578191 @default.
- W2000697151 creator A5027473851 @default.
- W2000697151 creator A5067040566 @default.
- W2000697151 creator A5085512740 @default.
- W2000697151 date "2004-01-01" @default.
- W2000697151 modified "2023-10-02" @default.
- W2000697151 title "Electrical Equivalent Sidewall Damage in Patterned Low-k Dielectrics" @default.
- W2000697151 cites W2009221461 @default.
- W2000697151 cites W2015505537 @default.
- W2000697151 cites W2028195635 @default.
- W2000697151 cites W2065217462 @default.
- W2000697151 cites W2118195368 @default.
- W2000697151 cites W2148677685 @default.
- W2000697151 cites W2152345916 @default.
- W2000697151 cites W4301524803 @default.
- W2000697151 doi "https://doi.org/10.1149/1.1649401" @default.
- W2000697151 hasPublicationYear "2004" @default.
- W2000697151 type Work @default.
- W2000697151 sameAs 2000697151 @default.
- W2000697151 citedByCount "24" @default.
- W2000697151 countsByYear W20006971512016 @default.
- W2000697151 countsByYear W20006971512017 @default.
- W2000697151 countsByYear W20006971512020 @default.
- W2000697151 crossrefType "journal-article" @default.
- W2000697151 hasAuthorship W2000697151A5002578191 @default.
- W2000697151 hasAuthorship W2000697151A5027473851 @default.
- W2000697151 hasAuthorship W2000697151A5067040566 @default.
- W2000697151 hasAuthorship W2000697151A5085512740 @default.
- W2000697151 hasConcept C116372231 @default.
- W2000697151 hasConcept C130277099 @default.
- W2000697151 hasConcept C132459708 @default.
- W2000697151 hasConcept C133386390 @default.
- W2000697151 hasConcept C134306372 @default.
- W2000697151 hasConcept C147789679 @default.
- W2000697151 hasConcept C159985019 @default.
- W2000697151 hasConcept C168651791 @default.
- W2000697151 hasConcept C17525397 @default.
- W2000697151 hasConcept C185592680 @default.
- W2000697151 hasConcept C192562407 @default.
- W2000697151 hasConcept C30066665 @default.
- W2000697151 hasConcept C33923547 @default.
- W2000697151 hasConcept C49040817 @default.
- W2000697151 hasConcept C86381522 @default.
- W2000697151 hasConceptScore W2000697151C116372231 @default.
- W2000697151 hasConceptScore W2000697151C130277099 @default.
- W2000697151 hasConceptScore W2000697151C132459708 @default.
- W2000697151 hasConceptScore W2000697151C133386390 @default.
- W2000697151 hasConceptScore W2000697151C134306372 @default.
- W2000697151 hasConceptScore W2000697151C147789679 @default.
- W2000697151 hasConceptScore W2000697151C159985019 @default.
- W2000697151 hasConceptScore W2000697151C168651791 @default.
- W2000697151 hasConceptScore W2000697151C17525397 @default.
- W2000697151 hasConceptScore W2000697151C185592680 @default.
- W2000697151 hasConceptScore W2000697151C192562407 @default.
- W2000697151 hasConceptScore W2000697151C30066665 @default.
- W2000697151 hasConceptScore W2000697151C33923547 @default.
- W2000697151 hasConceptScore W2000697151C49040817 @default.
- W2000697151 hasConceptScore W2000697151C86381522 @default.
- W2000697151 hasIssue "4" @default.
- W2000697151 hasLocation W20006971511 @default.
- W2000697151 hasOpenAccess W2000697151 @default.
- W2000697151 hasPrimaryLocation W20006971511 @default.
- W2000697151 hasRelatedWork W1992257316 @default.
- W2000697151 hasRelatedWork W1994753809 @default.
- W2000697151 hasRelatedWork W2000697151 @default.
- W2000697151 hasRelatedWork W2021714583 @default.
- W2000697151 hasRelatedWork W2043673973 @default.
- W2000697151 hasRelatedWork W2383379936 @default.
- W2000697151 hasRelatedWork W2913390918 @default.
- W2000697151 hasRelatedWork W4253731651 @default.
- W2000697151 hasRelatedWork W4280616684 @default.
- W2000697151 hasRelatedWork W4308743684 @default.
- W2000697151 hasVolume "7" @default.
- W2000697151 isParatext "false" @default.
- W2000697151 isRetracted "false" @default.
- W2000697151 magId "2000697151" @default.
- W2000697151 workType "article" @default.