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- W2000697844 abstract "Abstract Secondary ion mass spectrometric methods were used to study the effect of incident ion energy on atomic mixing in subsurface layers. A Ta2O5 film containing a 50 A 3lP-rich layer 230 A below the surface was depth profiled for phosphorus using normal incidence 160 primary particles of various energies (1.75 to 18.5 keV). A pronounced energy effect was observed in the widths of 31P profiles generated by >4 keV 16O. For 18.5 keV 16O, the observed profile contained two distinct components-the 31P-rich layer and the 31P recoil distribution. This later condition, prevails when the peak of the incident ion damage distribution occurs at a depth which equal or exceeds the distance from the surface to the 31P-rich layer. The desirable primary ion beam energy for characterizing the true elemental distribution is dictated by the shape and location of the layer to be profited. In most instances, a low energy beam is preferred." @default.
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- W2000697844 date "1974-01-01" @default.
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- W2000697844 title "Ion beam sputtering - the effect of incident ion energy on atomic mixing in subsurface layers" @default.
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- W2000697844 doi "https://doi.org/10.1080/00337577408232406" @default.
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