Matches in SemOpenAlex for { <https://semopenalex.org/work/W2000705390> ?p ?o ?g. }
Showing items 1 to 95 of
95
with 100 items per page.
- W2000705390 endingPage "328" @default.
- W2000705390 startingPage "325" @default.
- W2000705390 abstract "We performed micromachining of relatively thick siloxane films by proton beam writing (PBW) with beam energy of 1 MeV. The polydimethylsiloxane (PDMS) prepolymer films with a thickness of about 13 μm were spin-coated onto silicon substrates. After exposure to the 1-MeV proton beam (～1 μm in diameter), the samples were developed. The PDMS shows the behavior of negative resist and can be regarded as analog resist where the thickness of the structure gradually increases as a function of the proton beam (PB) fluence. Using this feature of the PDMS, we manufactured micro lenses with diameter of 40 μm by changing PB fluence. Micro-patterning of the PDMS films using scanning proton beam can offer a possibility of making three-dimensional structures for silica-based devices without baking and mask process." @default.
- W2000705390 created "2016-06-24" @default.
- W2000705390 creator A5050276095 @default.
- W2000705390 creator A5064100180 @default.
- W2000705390 date "2011-01-01" @default.
- W2000705390 modified "2023-10-05" @default.
- W2000705390 title "Fabrication of silica-based three-dimensional structures by changing fluence using proton beam writing" @default.
- W2000705390 cites W1977386988 @default.
- W2000705390 cites W1981058187 @default.
- W2000705390 cites W2009272390 @default.
- W2000705390 cites W2015209383 @default.
- W2000705390 cites W2040291264 @default.
- W2000705390 cites W2041739734 @default.
- W2000705390 cites W2044745243 @default.
- W2000705390 cites W2046370410 @default.
- W2000705390 cites W2047283671 @default.
- W2000705390 cites W2058404465 @default.
- W2000705390 cites W2087446738 @default.
- W2000705390 cites W2124823145 @default.
- W2000705390 cites W2334765971 @default.
- W2000705390 doi "https://doi.org/10.14723/tmrsj.36.325" @default.
- W2000705390 hasPublicationYear "2011" @default.
- W2000705390 type Work @default.
- W2000705390 sameAs 2000705390 @default.
- W2000705390 citedByCount "9" @default.
- W2000705390 countsByYear W20007053902013 @default.
- W2000705390 countsByYear W20007053902014 @default.
- W2000705390 countsByYear W20007053902017 @default.
- W2000705390 countsByYear W20007053902018 @default.
- W2000705390 countsByYear W20007053902019 @default.
- W2000705390 crossrefType "journal-article" @default.
- W2000705390 hasAuthorship W2000705390A5050276095 @default.
- W2000705390 hasAuthorship W2000705390A5064100180 @default.
- W2000705390 hasBestOaLocation W20007053901 @default.
- W2000705390 hasConcept C120665830 @default.
- W2000705390 hasConcept C121332964 @default.
- W2000705390 hasConcept C136525101 @default.
- W2000705390 hasConcept C142724271 @default.
- W2000705390 hasConcept C145667562 @default.
- W2000705390 hasConcept C159985019 @default.
- W2000705390 hasConcept C168834538 @default.
- W2000705390 hasConcept C192562407 @default.
- W2000705390 hasConcept C204787440 @default.
- W2000705390 hasConcept C22078206 @default.
- W2000705390 hasConcept C2776139660 @default.
- W2000705390 hasConcept C2779227376 @default.
- W2000705390 hasConcept C2779849746 @default.
- W2000705390 hasConcept C49040817 @default.
- W2000705390 hasConcept C520434653 @default.
- W2000705390 hasConcept C521977710 @default.
- W2000705390 hasConcept C53524968 @default.
- W2000705390 hasConcept C54516573 @default.
- W2000705390 hasConcept C62520636 @default.
- W2000705390 hasConcept C71924100 @default.
- W2000705390 hasConceptScore W2000705390C120665830 @default.
- W2000705390 hasConceptScore W2000705390C121332964 @default.
- W2000705390 hasConceptScore W2000705390C136525101 @default.
- W2000705390 hasConceptScore W2000705390C142724271 @default.
- W2000705390 hasConceptScore W2000705390C145667562 @default.
- W2000705390 hasConceptScore W2000705390C159985019 @default.
- W2000705390 hasConceptScore W2000705390C168834538 @default.
- W2000705390 hasConceptScore W2000705390C192562407 @default.
- W2000705390 hasConceptScore W2000705390C204787440 @default.
- W2000705390 hasConceptScore W2000705390C22078206 @default.
- W2000705390 hasConceptScore W2000705390C2776139660 @default.
- W2000705390 hasConceptScore W2000705390C2779227376 @default.
- W2000705390 hasConceptScore W2000705390C2779849746 @default.
- W2000705390 hasConceptScore W2000705390C49040817 @default.
- W2000705390 hasConceptScore W2000705390C520434653 @default.
- W2000705390 hasConceptScore W2000705390C521977710 @default.
- W2000705390 hasConceptScore W2000705390C53524968 @default.
- W2000705390 hasConceptScore W2000705390C54516573 @default.
- W2000705390 hasConceptScore W2000705390C62520636 @default.
- W2000705390 hasConceptScore W2000705390C71924100 @default.
- W2000705390 hasIssue "3" @default.
- W2000705390 hasLocation W20007053901 @default.
- W2000705390 hasOpenAccess W2000705390 @default.
- W2000705390 hasPrimaryLocation W20007053901 @default.
- W2000705390 hasRelatedWork W1967348842 @default.
- W2000705390 hasRelatedWork W1992598011 @default.
- W2000705390 hasRelatedWork W1999434359 @default.
- W2000705390 hasRelatedWork W2004910611 @default.
- W2000705390 hasRelatedWork W2025762116 @default.
- W2000705390 hasRelatedWork W2066234106 @default.
- W2000705390 hasRelatedWork W2089501695 @default.
- W2000705390 hasRelatedWork W401686426 @default.
- W2000705390 hasRelatedWork W4232147920 @default.
- W2000705390 hasRelatedWork W248101115 @default.
- W2000705390 hasVolume "36" @default.
- W2000705390 isParatext "false" @default.
- W2000705390 isRetracted "false" @default.
- W2000705390 magId "2000705390" @default.
- W2000705390 workType "article" @default.