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- W2000705500 abstract "The proportionality coefficient between hydrogen concentration and the integrated intensities of the infrared reflection-absorption spectrum (IRAS) for CHn bonds was determined in hydrogenated amorphous carbon films (a-C:H) and hydrogenated silicon carbide films (a-SiC: H). The hydrogen concentration in the films was measured by using elastic recoil detection (ERD) analysis. Since the absorption strength of the CHn band strongly depends on the chemical structure of the films, the proportionality coefficients were obtained by the band separation of the IR spectrum as A(CH) = 3.85 × 1021 atoms/cm2, A(CH2) = 3.85 × 1020 atoms/cm2 and A(CH3) = 3.65 × 1020 atoms/cm2. These values can be applicable universally to a-C:H and a-SiC:H films." @default.
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- W2000705500 date "1990-01-01" @default.
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- W2000705500 title "Determination of the infrared proportionality coefficient of the CHn stretching mode for a-C:H and a-SiC:H films using ERD methods" @default.
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- W2000705500 doi "https://doi.org/10.1016/0168-583x(90)90822-c" @default.
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