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- W2000712291 abstract "The role of ion implantation in the fabrication of semiconductor devices is reviewed with special reference to silicon planar technology. The applications of ion implantation to various devices is discussed in detail. A summary is given of the present state of the art in the compound semiconductor field." @default.
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- W2000712291 date "1972-01-01" @default.
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- W2000712291 title "Ion implantation in semiconductor device technology" @default.
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- W2000712291 doi "https://doi.org/10.1049/ree.1972.0044" @default.
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