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- W2000719911 abstract "Aluminum nitride (AlN) films, using a dual ion beam sputtering, were prepared over the argon ion beam voltage ranging from 800 to 1200 V at room temperature. The AlN films were (0 0 2) and (1 0 0) planes. Excepting for operating at 1000 V, the AlN films exhibited the (0 0 2) preferred orientation. The growth exponents ranged from 0.27 to 0.23 and decreased with increasing argon ion beam voltage. The concentration of aluminum was richer than that of nitrogen in the films at all argon ion beam voltages. The concentration of aluminum decreased markedly with increasing the texture coefficient of AlN(0 0 2) plane." @default.
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- W2000719911 date "2006-01-01" @default.
- W2000719911 modified "2023-09-30" @default.
- W2000719911 title "Argon ion beam voltages influence the microstructure of aluminum nitride films in a dual ion beam sputtering system" @default.
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- W2000719911 doi "https://doi.org/10.1016/j.nimb.2005.08.042" @default.
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