FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2000737411> ?p ?o ?g. }

• W2000737411 endingPage "206" @default.
• W2000737411 startingPage "201" @default.
• W2000737411 abstract "A1N films were deposited onto silicon substrates in d.c. planar magnetron system by means of reactive sputtering of aluminium in an atmosphere of nitrogen. The influence of the deposition conditions and of post-deposition annealing on the properties of the insulator and the A1NSi interface were investigated." @default.
• W2000737411 created "2016-06-24" @default.
• W2000737411 creator A5007265502 @default.
• W2000737411 creator A5017184824 @default.
• W2000737411 creator A5084694219 @default.
• W2000737411 date "1981-07-01" @default.
• W2000737411 modified "2023-09-27" @default.
• W2000737411 title "Deposition of A1N thin films by magnetron reactive sputtering" @default.
• W2000737411 cites W1968065658 @default.
• W2000737411 cites W1968551004 @default.
• W2000737411 cites W1986974823 @default.
• W2000737411 cites W1996884198 @default.
• W2000737411 cites W2021446653 @default.
• W2000737411 cites W2028148029 @default.
• W2000737411 cites W2032501218 @default.
• W2000737411 cites W2042668278 @default.
• W2000737411 cites W2047378758 @default.
• W2000737411 cites W2056838265 @default.
• W2000737411 cites W2063365076 @default.
• W2000737411 cites W2066627854 @default.
• W2000737411 cites W2074247637 @default.
• W2000737411 cites W2075133092 @default.
• W2000737411 cites W2084068849 @default.
• W2000737411 cites W2089502317 @default.
• W2000737411 cites W2090433958 @default.
• W2000737411 doi "https://doi.org/10.1016/0040-6090(81)90482-x" @default.
• W2000737411 hasPublicationYear "1981" @default.
• W2000737411 type Work @default.
• W2000737411 sameAs 2000737411 @default.
• W2000737411 citedByCount "44" @default.
• W2000737411 countsByYear W20007374112012 @default.
• W2000737411 countsByYear W20007374112014 @default.
• W2000737411 countsByYear W20007374112016 @default.
• W2000737411 countsByYear W20007374112020 @default.
• W2000737411 countsByYear W20007374112022 @default.
• W2000737411 crossrefType "journal-article" @default.
• W2000737411 hasAuthorship W2000737411A5007265502 @default.
• W2000737411 hasAuthorship W2000737411A5017184824 @default.
• W2000737411 hasAuthorship W2000737411A5084694219 @default.
• W2000737411 hasConcept C123408415 @default.
• W2000737411 hasConcept C127313418 @default.
• W2000737411 hasConcept C127413603 @default.
• W2000737411 hasConcept C151730666 @default.
• W2000737411 hasConcept C171250308 @default.
• W2000737411 hasConcept C178790620 @default.
• W2000737411 hasConcept C185592680 @default.
• W2000737411 hasConcept C19067145 @default.
• W2000737411 hasConcept C191897082 @default.
• W2000737411 hasConcept C192562407 @default.
• W2000737411 hasConcept C22423302 @default.
• W2000737411 hasConcept C2777855556 @default.
• W2000737411 hasConcept C2816523 @default.
• W2000737411 hasConcept C42360764 @default.
• W2000737411 hasConcept C49040817 @default.
• W2000737411 hasConcept C513153333 @default.
• W2000737411 hasConcept C537208039 @default.
• W2000737411 hasConcept C544956773 @default.
• W2000737411 hasConcept C61427134 @default.
• W2000737411 hasConcept C64297162 @default.
• W2000737411 hasConcept C97892325 @default.
• W2000737411 hasConceptScore W2000737411C123408415 @default.
• W2000737411 hasConceptScore W2000737411C127313418 @default.
• W2000737411 hasConceptScore W2000737411C127413603 @default.
• W2000737411 hasConceptScore W2000737411C151730666 @default.
• W2000737411 hasConceptScore W2000737411C171250308 @default.
• W2000737411 hasConceptScore W2000737411C178790620 @default.
• W2000737411 hasConceptScore W2000737411C185592680 @default.
• W2000737411 hasConceptScore W2000737411C19067145 @default.
• W2000737411 hasConceptScore W2000737411C191897082 @default.
• W2000737411 hasConceptScore W2000737411C192562407 @default.
• W2000737411 hasConceptScore W2000737411C22423302 @default.
• W2000737411 hasConceptScore W2000737411C2777855556 @default.
• W2000737411 hasConceptScore W2000737411C2816523 @default.
• W2000737411 hasConceptScore W2000737411C42360764 @default.
• W2000737411 hasConceptScore W2000737411C49040817 @default.
• W2000737411 hasConceptScore W2000737411C513153333 @default.
• W2000737411 hasConceptScore W2000737411C537208039 @default.
• W2000737411 hasConceptScore W2000737411C544956773 @default.
• W2000737411 hasConceptScore W2000737411C61427134 @default.
• W2000737411 hasConceptScore W2000737411C64297162 @default.
• W2000737411 hasConceptScore W2000737411C97892325 @default.
• W2000737411 hasIssue "3" @default.
• W2000737411 hasLocation W20007374111 @default.
• W2000737411 hasOpenAccess W2000737411 @default.
• W2000737411 hasPrimaryLocation W20007374111 @default.
• W2000737411 hasRelatedWork W1968373997 @default.
• W2000737411 hasRelatedWork W2019423004 @default.
• W2000737411 hasRelatedWork W2062487702 @default.
• W2000737411 hasRelatedWork W2069547836 @default.
• W2000737411 hasRelatedWork W2086741567 @default.
• W2000737411 hasRelatedWork W2352499598 @default.
• W2000737411 hasRelatedWork W2353729944 @default.
• W2000737411 hasRelatedWork W2384143870 @default.
• W2000737411 hasRelatedWork W2753312755 @default.
• W2000737411 hasRelatedWork W2074340788 @default.
• W2000737411 hasVolume "81" @default.
• W2000737411 isParatext "false" @default.
• W2000737411 isRetracted "false" @default.

• next